Optimization of micro/nanooscillator parameters for analysis of transient adsorption processes

被引:0
作者
Djuric, Zoran G. [1 ]
Jokic, Ivana A. [1 ]
Frantlovic, Milos P. [1 ]
机构
[1] Univ Belgrade, IHTM Inst Microelect Technol & Single Crystals, Belgrade 11000, Serbia
来源
2008 26TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, VOLS 1 AND 2, PROCEEDINGS | 2008年
关键词
D O I
10.1109/ICMEL.2008.4559296
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We consider optimization of parameters of micro/nanooscillators intended for investigation of adsorptiondesorption (AD) processes, which are fast in comparison with the response rate of the oscillator itself. We consider the choice of the values of the Q-factor, the resonant frequency of the micro/nanocantilever and the excitation frequency, in order to ensure that experimentally obtained micro/nanooscillator tirne response can be used for extraction of information about the AD process parameters. It is shown that a very small cantilever, which has a very high resonant frequency, can be used for investigation of AD processes whose time constant is as short as 10(-5) s.
引用
收藏
页码:359 / 362
页数:4
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