Photoluminescence investigation of strictly ordered Ge dots grown on pit-patterned Si substrates

被引:17
作者
Brehm, Moritz [1 ,2 ]
Grydlik, Martyna [1 ,2 ,3 ]
Tayagaki, Takeshi [1 ,4 ]
Langer, Gregor [2 ]
Schaeffler, Friedrich [2 ]
Schmidt, Oliver G. [1 ,3 ]
机构
[1] IFW Dresden, Inst Integrat Nanosci, D-01069 Dresden, Germany
[2] Johannes Kepler Univ Linz, Inst Semicond & Solid State Phys, A-4040 Linz, Austria
[3] Tech Univ Dresden, Ctr Adv Elect Dresden, CfAED, Dresden, Germany
[4] Kyoto Univ, Inst Chem Res, Uji, Kyoto 6110011, Japan
基金
奥地利科学基金会;
关键词
photoluminescence; ordered nanostructures; quantum dots; Ge on Si; molecular beam epitaxy; SELF-ORGANIZATION; TRENCH FORMATION; QUANTUM-DOTS; ISLANDS; EVOLUTION; SI(001); NANOSTRUCTURES; EXCITONS; ARRAYS;
D O I
10.1088/0957-4484/26/22/225202
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We investigate the optical properties of ordered Ge quantum dots (QDs) by means of micro-photoluminescence spectroscopy (PL). These were grown on pit-patterned Si(001) substrates with a wide range of pit-periods and thus inter QD-distances (425-3400 nm). By exploiting almost arbitrary inter-QD distances achievable in this way we are able to choose the number of QDs that contribute to the PL emission in a range between 70 and less than three QDs. This well-defined system allows us to clarify, by PL-investigation, several points which are important for the understanding of the formation and optical properties of ordered QDs. We directly trace and quantify the amount of Ge transferred from the surrounding wetting layer (WL) to the QDs in the pits. Moreover, by exploiting different pit-shapes, we reveal the role of strain-induced activation energy barriers that have to be overcome for charge carriers generated outside the dots. These need to diffuse between the energy minimum of the WL in and between the pits, and the one in the QDs. In addition, we demonstrate that the WL in the pits is already severely intermixed with Si before upright QDs nucleate, which further enhances intermixing of ordered QDs as compared to QDs grown on planar substrates. Furthermore, we quantitatively determine the amount of Ge transferred by surface diffusion through the border region between planar and patterned substrate. This is important for the growth of ordered islands on patterned fields of finite size. We highlight that the Ge WL-facets in the pits act as PL emission centres, similar to upright QDs.
引用
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页数:11
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共 53 条
[1]   Growth and self-organization of SiGe nanostructures [J].
Aqua, J. -N. ;
Berbezier, I. ;
Favre, L. ;
Frisch, T. ;
Ronda, A. .
PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS, 2013, 522 (02) :59-189
[2]   SiGe nanostructures [J].
Berbezier, I. ;
Ronda, A. .
SURFACE SCIENCE REPORTS, 2009, 64 (02) :47-98
[3]   Anomalous Smoothing Preceding Island Formation During Growth on Patterned Substrates [J].
Bergamaschini, R. ;
Tersoff, J. ;
Tu, Y. ;
Zhang, J. J. ;
Bauer, G. ;
Montalenti, F. .
PHYSICAL REVIEW LETTERS, 2012, 109 (15)
[4]   Evolution and coarsening of Si-rich SiGe islands epitaxially grown at high temperatures on Si(001) [J].
Brehm, M. ;
Grydlik, M. ;
Schaeffler, F. ;
Schmidt, O. G. .
MICROELECTRONIC ENGINEERING, 2014, 125 :22-27
[5]   The influence of a Si cap on self-organized SiGe islands and the underlying wetting layer [J].
Brehm, M. ;
Grydlik, M. ;
Groiss, H. ;
Hackl, F. ;
Schaeffler, F. ;
Fromherz, T. ;
Bauer, G. .
JOURNAL OF APPLIED PHYSICS, 2011, 109 (12)
[6]   Excitation Intensity Driven PL Shifts of SiGe Islands on Patterned and Planar Si(001) Substrates: Evidence for Ge-rich Dots in Islands [J].
Brehm, M. ;
Grydlik, M. ;
Hackl, F. ;
Lausecker, E. ;
Fromherz, T. ;
Bauer, G. .
NANOSCALE RESEARCH LETTERS, 2010, 5 (12) :1868-1872
[7]   Quantitative determination of Ge profiles across SiGe wetting layers on Si (001) [J].
Brehm, M. ;
Grydlik, M. ;
Lichtenberger, H. ;
Fromherz, T. ;
Hrauda, N. ;
Jantsch, W. ;
Schaeffler, F. ;
Bauer, G. .
APPLIED PHYSICS LETTERS, 2008, 93 (12)
[8]   Key role of the wetting layer in revealing the hidden path of Ge/Si(001) Stranski-Krastanow growth onset [J].
Brehm, Moritz ;
Montalenti, Francesco ;
Grydlik, Martyna ;
Vastola, Guglielmo ;
Lichtenberger, Herbert ;
Hrauda, Nina ;
Beck, Matthew J. ;
Fromherz, Thomas ;
Schaeffler, Friedrich ;
Miglio, Leo ;
Bauer, Guenther .
PHYSICAL REVIEW B, 2009, 80 (20)
[9]   Strain relief via trench formation in Ge/Si(100) islands [J].
Chaparro, SA ;
Zhang, Y ;
Drucker, J .
APPLIED PHYSICS LETTERS, 2000, 76 (24) :3534-3536
[10]   Initial stage of the two-dimensional to three-dimensional transition of a strained SiGe layer on a pit-patterned Si(001) template [J].
Chen, Gang ;
Lichtenberger, H. ;
Bauer, G. ;
Jantsch, W. ;
Schaeffler, F. .
PHYSICAL REVIEW B, 2006, 74 (03)