ZnO thin film characterization by X-ray reflectivity optimization using genetic algorithm and Fourier transformation

被引：6
作者：
Solookinejad, Ghahraman [1 ]
Rozatian, Amir Sayid Hassan [1 ]
Habibi, Mohammad Hossein [2 ]
机构：
[1] Univ Isfahan, Dept Phys, Esfahan 8174673441, Iran
[2] Univ Isfahan, Dept Chem, Esfahan 8174673441, Iran
来源：
APPLIED SURFACE SCIENCE | 2011年 / 258卷 / 01期
关键词：
X-ray reflectivity; Genetic algorithm; Zinc oxide; Fourier transformation; ZINC-OXIDE; REFLECTOMETRY; TRANSDUCER; MORPHOLOGY; SURFACE;
D O I：
10.1016/j.apsusc.2011.08.043
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Zinc oxide (ZnO) thin film was fabricated by sol-gel spin coating method on glass substrate. X-ray reflectivity (XRR) and its optimization have been used for characterization and extracting physical parameters of the film. Genetic algorithm (GA) has been applied for this optimization process. The model independent information was needed to establish data analyzing process for X-ray reflectivity before optimization process. Independent information was exploited from Fourier transform of Fresnel reflectivity normalized X-ray reflectivity. This Fourier transformation (Auto Correlation Function) yields thickness of each coated layer on substrate. This information is a keynote for constructing optimization process. Specular X-ray reflectivity optimization yields structural parameters such as thickness, roughness of surface and interface and electron density profile of the film. Acceptable agreement exists between results obtained from Fourier transformation and X-ray reflectivity fitting. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码：260 / 264
页数：5
相关论文
共 25 条
[1]  
An C.H., 1994, CHEMINFORM ABSTR, V25
[2]   Recent advances in characterization of ultra-thin films using specular X-ray reflectivity technique [J].
Banerjee, S ;
Ferrari, S ;
Chateigner, D ;
Gibaud, A .
THIN SOLID FILMS, 2004, 450 (01) :23-28
[3]   Guided-wave acoustooptic interaction with phase modulation in a ZnO thin-film transducer on an Si-based integrated Mach-Zehnder interferometer [J].
Bonnotte, E ;
Gorecki, C ;
Toshiyoshi, H ;
Kawakatsu, H ;
Fujita, H ;
Wörhoff, K ;
Hashimoto, K .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1999, 17 (01) :35-42
[4]   Application of genetic algorithms for characterization of thin layered materials by glancing incidence X-ray reflectometry [J].
Dane, AD ;
Veldhuis, A ;
de Boer, DKG ;
Leenaers, AJG ;
Buydens, LMC .
PHYSICA B, 1998, 253 (3-4) :254-268
[5]   Characterization of multilayered materials for optoelectronic components by high-resolution X-ray diffractometry and reflectometry: contribution of numerical treatments [J].
Durand, O .
THIN SOLID FILMS, 2004, 450 (01) :51-59
[6]   Crystallization behavior and origin of c-axis orientation in sol-gel-derived ZnO:Li thin films on glass substrates [J].
Fujihara, S ;
Sasaki, C ;
Kimura, T .
APPLIED SURFACE SCIENCE, 2001, 180 (3-4) :341-350
[7]   Thickness determination of SrZrO3 thin films using both X-ray reflectometry and SIMS techniques [J].
Galicka-Fau, K. ;
Legros, C. ;
Andrieux, M. ;
Herbst-Ghysel, M. ;
Gallet, I. ;
Condat, M. ;
Durand, O. ;
Servet, B. .
THIN SOLID FILMS, 2008, 516 (22) :7967-7973
[8]   Fractal, wavelet and Fourier analysis for investigation of nanoscale CoSi2 structures in Si produced by ion synthesis [J].
Gerasimenko, NN ;
Pavluchenko, MN ;
Levchenko, VD ;
Djamanbalin, KK ;
Troitskiy, VY ;
Skobochkin, AM .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2003, 206 :299-303
[9]   Influence of postdeposition annealing on the structural and optical properties of sputtered zinc oxide film [J].
Gupta, V ;
Mansingh, A .
JOURNAL OF APPLIED PHYSICS, 1996, 80 (02) :1063-1073
[10]   Structure and Morphology of Nanostructured Zinc Oxide Thin Films Prepared by Dip- vs. Spin-Coating Methods [J].
Habibi, M. H. ;
Sardashti, M. Khaledi .
JOURNAL OF THE IRANIAN CHEMICAL SOCIETY, 2008, 5 (04) :603-609
123