Particle on surface: 3D-effects in dry laser cleaning (vol A81, pg 1329, 2005)

被引：2
|
作者：
Luk'yanchuk, BS [1 ]
Wang, ZB [1 ]
Song, WD [1 ]
Hong, MH [1 ]
机构：
[1] Data Storage Inst, Singapore 117608, Singapore
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2005年 / 81卷 / 06期
关键词：
D O I：
10.1007/s00339-005-3296-z
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：1329 / 1329
页数：1
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