Flexible Nanoporous WO3-x Nonvolatile Memory Device

被引:115
作者
Ji, Yongsung [1 ]
Yang, Yang [4 ,5 ]
Lee, Seoung-Ki [1 ]
Ruan, Gedeng [1 ]
Kim, Tae-Wook [6 ]
Fei, Huilong [1 ]
Lee, Seung-Hoon [7 ]
Kim, Dong-Yu [7 ]
Yoon, Jongwon [1 ]
Tour, James M. [1 ,2 ,3 ]
机构
[1] Rice Univ, Dept Chem, 6100 Main St, Houston, TX 77005 USA
[2] Rice Univ, NanoCarbon Ctr, 6100 Main St, Houston, TX 77005 USA
[3] Rice Univ, Dept Mat Sci & NanoEngn, 6100 Main St, Houston, TX 77005 USA
[4] Univ Cent Florida, Nanosci Technol Ctr, 12424 Res Pkwy, Orlando, FL 32826 USA
[5] Univ Cent Florida, Dept Mat Sci & Engn, 12424 Res Pkwy, Orlando, FL 32826 USA
[6] Korea Inst Sci & Technol, Inst Adv Composite Mat, Soft Innovat Mat Res Ctr, Joellabuk Do 565905, South Korea
[7] Gwangju Inst Sci & Technol, Sch Mat Sci & Engn, Gwangju 500712, South Korea
关键词
resistive random access memory; flexible memory; WO3-x memory; nanoporous; RESISTANCE SWITCHING CHARACTERISTICS; MEMRISTIVE DEVICES; THIN-FILM; NANOSHEETS; EVOLUTION; RERAM;
D O I
10.1021/acsnano.6b02711
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Flexible resistive random access memory (RRAM) devices have attracted great interest for future nonvolatile memories. However, making active layer films at high temperature can be a hindrance to RRAM device fabrication on flexible substrates. Here, we introduced a flexible nanoporous (NP) WO3-x RRAM device using anodic treatment in a room-temperature process. The flexible NP WO3-x RRAM device showed bipolar switching characteristics and a high I-ON/IOFF ratio of similar to 10(5). The device also showed stable retention time over 5 X 10(5) s, outstanding cell-to-cell uniformity, and bending endurance over 10(3) cycles when maximum bending conditions.
引用
收藏
页码:7598 / 7603
页数:6
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