Flexible Nanoporous WO3-x Nonvolatile Memory Device

被引:117
作者
Ji, Yongsung [1 ]
Yang, Yang [4 ,5 ]
Lee, Seoung-Ki [1 ]
Ruan, Gedeng [1 ]
Kim, Tae-Wook [6 ]
Fei, Huilong [1 ]
Lee, Seung-Hoon [7 ]
Kim, Dong-Yu [7 ]
Yoon, Jongwon [1 ]
Tour, James M. [1 ,2 ,3 ]
机构
[1] Rice Univ, Dept Chem, 6100 Main St, Houston, TX 77005 USA
[2] Rice Univ, NanoCarbon Ctr, 6100 Main St, Houston, TX 77005 USA
[3] Rice Univ, Dept Mat Sci & NanoEngn, 6100 Main St, Houston, TX 77005 USA
[4] Univ Cent Florida, Nanosci Technol Ctr, 12424 Res Pkwy, Orlando, FL 32826 USA
[5] Univ Cent Florida, Dept Mat Sci & Engn, 12424 Res Pkwy, Orlando, FL 32826 USA
[6] Korea Inst Sci & Technol, Inst Adv Composite Mat, Soft Innovat Mat Res Ctr, Joellabuk Do 565905, South Korea
[7] Gwangju Inst Sci & Technol, Sch Mat Sci & Engn, Gwangju 500712, South Korea
关键词
resistive random access memory; flexible memory; WO3-x memory; nanoporous; RESISTANCE SWITCHING CHARACTERISTICS; MEMRISTIVE DEVICES; THIN-FILM; NANOSHEETS; EVOLUTION; RERAM;
D O I
10.1021/acsnano.6b02711
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Flexible resistive random access memory (RRAM) devices have attracted great interest for future nonvolatile memories. However, making active layer films at high temperature can be a hindrance to RRAM device fabrication on flexible substrates. Here, we introduced a flexible nanoporous (NP) WO3-x RRAM device using anodic treatment in a room-temperature process. The flexible NP WO3-x RRAM device showed bipolar switching characteristics and a high I-ON/IOFF ratio of similar to 10(5). The device also showed stable retention time over 5 X 10(5) s, outstanding cell-to-cell uniformity, and bending endurance over 10(3) cycles when maximum bending conditions.
引用
收藏
页码:7598 / 7603
页数:6
相关论文
共 44 条
[1]   Write current reduction in transition metal oxide based resistance-change memory [J].
Ahn, Seung-Eon ;
Lee, Myoung-Jae ;
Park, Youngsoo ;
Kang, Bo Soo ;
Lee, Chang Bum ;
Kim, Ki Hwan ;
Seo, Sunae ;
Suh, Dong-Seok ;
Kim, Dong-Chirl ;
Hur, Jihyun ;
Xianyu, Wenxu ;
Stefanovich, Genrikh ;
Yin, Hit. Axiang ;
Yoo, In-Kyeong ;
Lee, Atng-Hyun ;
Park, Jong-Bong ;
Baek, In-Gyu ;
Park, Bae Ho .
ADVANCED MATERIALS, 2008, 20 (05) :924-+
[2]   Resistive Random Access Memory (ReRAM) Based on Metal Oxides [J].
Akinaga, Hiroyuki ;
Shima, Hisashi .
PROCEEDINGS OF THE IEEE, 2010, 98 (12) :2237-2251
[3]  
Chien W. C., 2010, 2010 IEEE International Electron Devices Meeting (IEDM 2010), DOI 10.1109/IEDM.2010.5703390
[4]   Purely Electronic Switching with High Uniformity, Resistance Tunability, and Good Retention in Pt-Dispersed SiO2 Thin Films for ReRAM [J].
Choi, Byung Joon ;
Chen, Albert B. K. ;
Yang, Xiang ;
Chen, I-Wei .
ADVANCED MATERIALS, 2011, 23 (33) :3847-+
[5]   Resistive switching characteristics of polycrystalline SrTiO3 films [J].
Choi, Hyung Jong ;
Park, Suk Won ;
Han, Gwon Deok ;
Na, Junhong ;
Kim, Gyu-Tae ;
Shim, Joon Hyung .
APPLIED PHYSICS LETTERS, 2014, 104 (24)
[6]   ELECTRICAL PHENOMENA IN AMORPHOUS OXIDE FILMS [J].
DEARNALEY, G ;
STONEHAM, AM ;
MORGAN, DV .
REPORTS ON PROGRESS IN PHYSICS, 1970, 33 (11) :1129-+
[7]   Bipolar resistive switching behavior of La0.5Sr0.5CoO3-σ films for nonvolatile memory applications [J].
Fu, Y. J. ;
Xia, F. J. ;
Jia, Y. L. ;
Jia, C. J. ;
Li, J. Y. ;
Dai, X. H. ;
Fu, G. S. ;
Zhu, B. Y. ;
Liu, B. T. .
APPLIED PHYSICS LETTERS, 2014, 104 (22)
[8]   TiO2-based memristors and ReRAM: materials, mechanisms and models (a review) [J].
Gale, Ella .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2014, 29 (10)
[9]   Dynamic Processes of Resistive Switching in Metallic Filament-Based Organic Memory Devices [J].
Gao, Shuang ;
Song, Cheng ;
Chen, Chao ;
Zeng, Fei ;
Pan, Feng .
JOURNAL OF PHYSICAL CHEMISTRY C, 2012, 116 (33) :17955-17959
[10]   On the resistive switching mechanisms of Cu/ZrO2:Cu/Pt [J].
Guan, Weihua ;
Liu, Ming ;
Long, Shibing ;
Liu, Qi ;
Wang, Wei .
APPLIED PHYSICS LETTERS, 2008, 93 (22)