Electrical characteristics of metal-ferroelectric-semiconductor structures based on poly(vinylidene fluoride)

被引:7
作者
Kim, Jeong Hwan [1 ]
Kim, Dong Won [1 ]
Jeon, Ho Seung [1 ]
Park, Yung Eun [1 ]
机构
[1] Univ Seoul, Dept Elect & Comp Engn, Seoul 130743, South Korea
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2007年 / 46卷 / 10B期
关键词
PVDF; sol-gel; MFS; FRAM; low voltage; memory;
D O I
10.1143/JJAP.46.6976
中图分类号
O59 [应用物理学];
学科分类号
摘要
We prepared poly(vinylidene fluoride) (PVDF) films in the beta phase by a sol-gel method using PVDF solutions with different weight fractions. The electrical properties of PVDF films were studied for the possibility of using them in one-transistor (1-T)type ferroelectric random-access memories (FRAMs). In this research, the Au/PVDF/Si structure made from PVDF solution of 6 wt % concentration showed good ferroelectric and electrical properties. The memory window width and current density for the PVDF film from the 6 wt % PVDF solution were about 1.8 V and 10(-6) A/cm(2) for a bias voltage of 5 V, respectively. It is expected from these good ferroelectric properties that PVDF films will be suitable for low-cost 1-T-type FRAMs operating at a low voltage.
引用
收藏
页码:6976 / 6978
页数:3
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