Traceable calibration of transfer standards for scanning probe microscopy

被引：65

作者：

Haycocks, J ^{[1
]}

Jackson, K ^{[1
]}

机构：

[1] Natl Phys Lab, Teddington TW11 0LW, Middx, England

来源：

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2005年 / 29卷 / 02期

关键词：

atomic force microscopy; traceable calibrations; measurement uncertainty;

D O I：

10.1016/j.precisioneng.2004.06.002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A Metrological Atomic Force Microscope (MAFM) has been constructed for the traceable calibration of transfer standards for scanning probe microscopy. It uses optical interferometry to generate image scales with direct traceability to the national standard of length. Three interferometers monitor the relative displacements of the AFM tip and sample in the x, y, and z directions and the interferometer data is used directly to construct 3D images of sample surfaces. Traceable dimensional measurement of surface features may then be derived from the image data. This paper describes the MAFM instrument and presents a measurement uncertainty budget. Examples are given of measurements of pitch and step height on calibration transfer standards for scanning probe microscopy. Crown Copyright (c) 2004 Published by Elsevier Inc. All rights reserved.

引用

页码：168 / 175

页数：8

共 13 条

[1] [Anonymous], 2000, 54361 ISO, P9
[2] OPTICAL FRINGE SUBDIVISION WITH NANOMETRIC ACCURACY
BIRCH, KP
[J]. PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1990, 12 (04): : 195 - 198
[3] DIXON R, 1999, SPIE, V3677, P20
[4] Influence of data analysis and other factors on the short-term stability of vertical scanning-probe microscope calibration measurements
Edwards, H
Jorgensen, JF
Dagata, J
Strausser, Y
Schneir, J
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (02): : 633 - 644
[5] GARNAES J, 2000, P 10 INT C SURF CHEM, P277
[6] Real-time, interferometrically measuring atomic force microscope for direct calibration of standards
Gonda, S
Doi, T
Kurosawa, T
Tanimura, Y
Hisata, N
Yamagishi, T
Fujimoto, H
Yukawa, H
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (08) : 3362 - 3368
[7] DETERMINATION AND CORRECTION OF QUADRATURE FRINGE MEASUREMENT ERRORS IN INTERFEROMETERS
HEYDEMANN, PLM
[J]. APPLIED OPTICS, 1981, 20 (19): : 3382 - 3384
[8] Lateral metrology using scanning probe microscopes, 2D pitch standards and image processing
Jorgensen, JF
Jensen, CP
Garnaes, J
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1998, 66 (Suppl 1): : S847 - S852
[9] Koenders L., 2001, P 5 SEM QUANT MICR 1, P50
[10] Traceable measurement of surface texture at the National Physical Laboratory using NanoSurf IV
Leach, RK
[J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 2000, 11 (08) : 1162 - 1172

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