Strong compensation of n-type Ge via formation of donor-vacancy complexes

被引:12
作者
Coutinho, J. [1 ]
Janke, C. [2 ]
Carvalho, A. [2 ]
Torres, V. J. B. [1 ]
Oberg, S. [3 ]
Jones, R. [2 ]
Briddon, P. R. [4 ]
机构
[1] Univ Aveiro, Dept Phys & I3N, P-3810193 Aveiro, Portugal
[2] Univ Exeter, Sch Phys, Exeter EX4 4QL, Devon, England
[3] Lulea Univ Technol, Dept Math, S-97187 Lulea, Sweden
[4] Newcastle Univ, Sch Nat Sci, Newcastle Upon Tyne NE1 7RU, Tyne & Wear, England
关键词
germanium; dopants; vacancies; compensation;
D O I
10.1016/j.physb.2007.08.141
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Vacancies and interstitials in semiconductors play a fundamental role in both high-temperature diffusion and low-temperature radiation and implantation damage. In Ge, a serious contender material for high-speed electronics applications, vacancies have historically been believed to dominate most diffusion related phenomena such as self-diffusivity or impurity migration. This is to be contrasted with silicon, where self-interstitials also play decisive roles, despite the similarities in the chemical nature of both materials. We report on density functional calculations of the formation and properties of vacancy-donor complexes in germanium. We predict that most vacancy-donor aggregates are deep acceptors, and together with their high solubilities, we conclude that they strongly contribute for inhibiting donor activation levels in germanium. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:179 / 183
页数:5
相关论文
共 26 条
[1]   Atomic transport in germanium and the mechanism of arsenic diffusion [J].
Bracht, Hartmut ;
Brotzmann, Sergej .
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2006, 9 (4-5) :471-476
[2]  
Briddon PR, 2000, PHYS STATUS SOLIDI B, V217, P131, DOI 10.1002/(SICI)1521-3951(200001)217:1<131::AID-PSSB131>3.0.CO
[3]  
2-M
[4]  
CARVALHO A, IN PRESS PHYS REV LE
[5]   TRANSIENT ENHANCED DIFFUSION DURING RAPID THERMAL ANNEALING OF BORON IMPLANTED SILICON [J].
CHO, K ;
NUMAN, M ;
FINSTAD, TG ;
CHU, WK ;
LIU, J ;
WORTMAN, JJ .
APPLIED PHYSICS LETTERS, 1985, 47 (12) :1321-1323
[6]   Atomic scale simulations of arsenic-vacancy complexes in germanium and silicon [J].
Chroneos, A. ;
Grimes, R. W. ;
Tsamis, C. .
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2006, 9 (4-5) :536-540
[7]   Activation and diffusion studies of ion-implanted p and n dopants in germanium [J].
Chui, CO ;
Gopalakrishnan, K ;
Griffin, PB ;
Plummer, JD ;
Saraswat, KC .
APPLIED PHYSICS LETTERS, 2003, 83 (16) :3275-3277
[8]   Donor-vacancy complexes in Ge:: Cluster and supercell calculations [J].
Coutinho, J. ;
Oberg, S. ;
Torres, V. J. B. ;
Barroso, M. ;
Jones, R. ;
Briddon, P. R. .
PHYSICAL REVIEW B, 2006, 73 (23)
[9]   Electronic structure and Jahn-Teller instabilities in a single vacancy in Ge [J].
Coutinho, J ;
Jones, R ;
Torres, VJB ;
Barroso, M ;
Öberg, S ;
Briddon, PR .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2005, 17 (48) :L521-L527
[10]   Oxygen and dioxygen centers in Si and Ge:: Density-functional calculations [J].
Coutinho, J ;
Jones, R ;
Briddon, PR ;
Öberg, S .
PHYSICAL REVIEW B, 2000, 62 (16) :10824-10840