Transparent Nanotubular Capacitors Based On Transplanted Anodic Aluminum Oxide Templates

被引：21

作者：

Zhang, Guozhen

Wu, Hao ^{[1
]}

Chen, Chao

Wang, Ti

Wu, Wenhui

Yue, Jin

Liu, Chang

机构：

[1] Wuhan Univ, Minist Educ, Key Lab Artificial Micro & Nanostruct, Wuhan 430072, Peoples R China

来源：

ACS APPLIED MATERIALS & INTERFACES | 2015年 / 7卷 / 09期

关键词：

transparent capacitors; atomic layer deposition; anodic aluminum oxide; THIN-FILM TRANSISTORS; LOW-VOLTAGE; FABRICATION; ARRAYS;

D O I：

10.1021/acsami.5b00080

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Transparent AlZnO/Al2O3/AlZnO nanocapacitor arrays have been fabricated by atomic layer deposition in anodic aluminum oxide templates transplanted on the AlZnO/glass substrates. A high capacitance density of 37 fF/mu m(2) is obtained, which is nearly 5.8 times bigger than that of planar capacitors. The capacitance density almost remains the same in a broad frequency range from 1 kHz to 200 kHz. Moreover, a low leakage current density of 1.7 x 10(-7) A/cm(2) at 1 V has been achieved. The nanocapacitors exhibit an average optical transmittance of more than 80% in the visible range, and thus open the door to practical applications in transparent integrated circuits.

引用

收藏

页码：5522 / 5527

页数：6

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