Integration of scanning probes and ion beams

被引：40

作者：

Persaud, A ^{[1
]}

Park, SJ

Liddle, JA

Schenkel, T

Bokor, J

Rangelow, IW

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

[3] Univ Kassel, Inst Microstruct Technol & Analyt, D-3500 Kassel, Germany

来源：

NANO LETTERS | 2005年 / 5卷 / 06期

关键词：

D O I：

10.1021/nl0506103

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We report the integration of a scanning force microscope with ion beams. The scanning probe images surface structures non-invasively and aligns the ion beam to regions of interest. The ion beam is transported through a hole in the scanning probe tip. Piezoresistive force sensors allow placement of micromachined cantilevers close to the ion beam lens. Scanning probe imaging and alignment is demonstrated in a vacuum chamber coupled to the ion beam line. Dot arrays are formed by ion implantation in resist layers on silicon samples with dot diameters limited by the hole size in the probe tips of a few hundred nm.

引用

页码：1087 / 1091

页数：5

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