Effects of electrolyte on micro-structure and properties of BaxSr(1-x)TiO3 films prepared by micro-arc oxidation

被引：5

作者：

Wang, Min ^{[1
,2
]}

Zuo, Xi ^{[1
]}

Li, Kang ^{[2
]}

Wang, Kang ^{[3
]}

机构：

[1] Guangdong Polytech Normal Univ, Coll Mech Engn, Guangzhou 510635, Peoples R China

[2] South China Univ Technol, Sch Mat Sci & Engn, Guangzhou 510641, Peoples R China

[3] DongGuan Univ Technol, Sch Mat Sci & Engn, Dongguan 523808, Peoples R China

来源：

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS | 2020年 / 31卷 / 11期

关键词：

BARIUM-STRONTIUM-TITANATE; THIN-FILMS; DIELECTRIC-PROPERTIES; FERROELECTRIC-FILMS; SURFACE-LAYER; MOCVD GROWTH; TEMPERATURE; FABRICATION; CERAMICS; OXYGEN;

D O I：

10.1007/s10854-020-03314-w

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

BaxSr(1-x)TiO3(BST) films are deposited on titanium substrate by micro-arc oxidation (MAO) technique under three electrolytes. The micro-structure and electrical properties of the BST thin films are analyzed and compared. The results show that the BST films obtained with these three electrolytes are all mainly composed of tetragonal BaxSr(1-x)TiO3. Compared with electrolyte without additive, both PVP30 and EDTA, as additive, significantly inhibit the growth of BST films, and the BST films become flat and dense. Moreover, the dielectric and ferroelectric properties of BST thin films are positively correlated with their micro-structure, and flat and dense BST film possesses good dielectric and ferroelectric properties. The residual polarization intensity of BST film prepared with the electrolyte involving PVP30 or EDTA is about 18 and 13 times of that of BST film prepared without additive, respectively.

引用

页码：8174 / 8182

页数：9

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