Large angle illumination enabling accurate structure reconstruction from thick samples in scanning transmission electron microscopy

被引:13
作者
Brown, H. G. [1 ,5 ]
Ishikawa, R. [2 ]
S'anchez-Santolino, G. [2 ,3 ]
Shibata, N. [2 ]
Ikuhara, Y. [2 ]
Allen, L. J. [4 ]
Findlay, S. D. [1 ]
机构
[1] Monash Univ, Sch Phys & Astron, Clayton, Vic 3800, Australia
[2] Univ Tokyo, Sch Engn, Inst Engn Innovat, Tokyo 1138656, Japan
[3] CSIC, Inst Ciencia Mat Madrid, E-28049 Madrid, Spain
[4] Univ Melbourne, Sch Phys, Parkville, Vic 3010, Australia
[5] Natl Ctr Electron Microscopy, Lawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA
关键词
Ptychography; Differential phase contrast; Scanning transmission electron microscopy; PHASE OBJECT APPROXIMATION; CONTRAST MICROSCOPY; STEM; DETECTOR; SPECIMENS; FIELDS;
D O I
10.1016/j.ultramic.2018.12.010
中图分类号
TH742 [显微镜];
学科分类号
摘要
Most reconstructions of the electrostatic potential of a specimen at atomic resolution assume a thin and weakly scattering sample, restricting accurate quantification to specimens only tens of Angstroms thick. We demonstrate that using large-angle-illumination scanning transmission electron microscopy (STEM)-a probe forming aperture with convergence angle larger than about 50 mrad-allows us to better meet the weak phase object approximation and thereby accurately reconstruct the electrostatic potential in samples thicker than the order of 100 angstrom.
引用
收藏
页码:112 / 121
页数:10
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