Aluminum doped zinc oxide coatings at low temperature by atmospheric pressure plasma jet

被引：8
作者：
Favaro, M. [1 ,2 ]
Zanazzi, E. [1 ,2 ]
Patelli, A. [3 ]
Carturan, S. [3 ,4 ]
Ceccato, R. [1 ]
Mulloni, V. [5 ]
Bortolotti, M. [1 ,5 ]
Quaranta, A. [1 ,2 ]
机构：
[1] Univ Trento, Dept Ind Engn, Via Sommarive 9, I-38123 Povo, Trento, Italy
[2] INFN TIFPA, Via Sommarive 14, I-38123 Povo, Trento, Italy
[3] Univ Padua, Dept Phys & Astron, Via F Marzolo 8, I-35121 Padua, Italy
[4] INFN Lab Nazl Legnaro, Viale Univ 2, I-35020 Legnaro, Italy
[5] Fdn Bruno Kessler, Ctr Mat & Microsyst, I-38123 Trento, Italy
来源：
THIN SOLID FILMS | 2020年 / 708卷
关键词：
THIN-FILMS; DEPOSITION; NANOPARTICLES; LUMINESCENCE; ENHANCEMENT;
D O I：
10.1016/j.tsf.2020.138118
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Pure and aluminum-doped zinc oxide thin films were produced with an atmospheric pressure plasma (APP) deposition process. Chemical, structural, morphological, electrical and optical analyses were carried out on samples coated with a plasma deposition process and with a spray pyrolysis process for comparison, respectively. The coatings were characterized by a compact layered structure of oxide islands, with a quite uniform distribution of Al in the network. Electrical measurements confirmed the active role and the dispersion of dopant in the zinc oxide network with an observed increase of conductivity even if high resistance values indicated a highly defective microstructure. In comparison to the spray pyrolysis coating the atmospheric pressure plasma coatings show a uniform substrate coverage and a higher chemical purity. © 2020 Elsevier B.V.
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页数：7
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