Fabrication and performance of graphene nanoelectromechanical systems

被引：50

作者：

Barton, Robert A. ^{[1
]}

Parpia, Jeevak ^{[2
]}

Craighead, Harold G. ^{[1
]}

机构：

[1] Cornell Univ, Dept Appl & Engn Phys, Ithaca, NY 14853 USA

[2] Cornell Univ, Dept Phys, Ithaca, NY 14853 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2011年 / 29卷 / 05期

基金：

美国国家科学基金会;

关键词：

CHEMICAL-VAPOR-DEPOSITION; SUSPENDED GRAPHENE; EPITAXIAL GRAPHENE; LARGE-AREA; MONOLAYER GRAPHENE; MECHANICAL RESONATORS; MESOSCOPIC GRAPHITE; ELASTIC PROPERTIES; CARBON NANOTUBES; GROUND-STATE;

D O I：

10.1116/1.3623419

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

As a result of the recent progress in fabricating large-area graphene sheets, graphene-based mechanical devices have become vastly easier to manufacture and now show even greater promise for a range of applications. This article reviews the progress of resonant graphene nanoelectromechanical systems and the possible applications of this technology to signal processing, sensing, and other areas. After discussing recent advances in fabrication and measurement techniques that make graphene resonators a viable technology, the article presents what is known about the performance of graphene mechanical systems. The authors also highlight unresolved questions, such as the source of the dissipation in graphene resonators, and discuss the progress made on these issues to date. The authors conclude with a discussion of important future directions for graphene research and the applications for which graphene nanomechanical devices may be well suited. (C) 2011 American Vacuum Society. [DOI: 10.1116/1.3623419]

引用

页数：10

共 95 条

[1] Transfer-Free Batch Fabrication of Large-Area Suspended Graphene Membranes [J].

Aleman, Benjamin ;

Regan, William ;

Aloni, Shaul ;

Altoe, Virginia ;

Alem, Nasim ;

Girit, Caglar ;

Geng, Baisong ;

Maserati, Lorenzo ;

Crommie, Michael ;

Wang, Feng ;

Zettl, A. .

ACS NANO, 2010, 4 (08) :4762-4768

[2] Near-field cavity optomechanics with nanomechanical oscillators [J].

Anetsberger, G. ;

Arcizet, O. ;

Unterreithmeier, Q. P. ;

Riviere, R. ;

Schliesser, A. ;

Weig, E. M. ;

Kotthaus, J. P. ;

Kippenberg, T. J. .

NATURE PHYSICS, 2009, 5 (12) :909-914

[3] Nanomechanical mass measurement using nonlinear response of a graphene membrane [J].

Atalaya, J. ;

Kinaret, J. M. ;

Isacsson, A. .

EPL, 2010, 91 (04)

[4]

Bae S, 2010, NAT NANOTECHNOL, V5, P574, DOI [10.1038/nnano.2010.132, 10.1038/NNANO.2010.132]

[5]

Bao WZ, 2009, NAT NANOTECHNOL, V4, P562, DOI [10.1038/nnano.2009.191, 10.1038/NNANO.2009.191]

[6] High, Size-Dependent Quality Factor in an Array of Graphene Mechanical Resonators [J].

Barton, Robert A. ;

Ilic, B. ;

van der Zande, Arend M. ;

Whitney, William S. ;

McEuen, Paul L. ;

Parpia, Jeevak M. ;

Craighead, Harold G. .

NANO LETTERS, 2011, 11 (03) :1232-1236

[7] Electronic confinement and coherence in patterned epitaxial graphene [J].

Berger, Claire ;

Song, Zhimin ;

Li, Xuebin ;

Wu, Xiaosong ;

Brown, Nate ;

Naud, Cecile ;

Mayou, Didier ;

Li, Tianbo ;

Hass, Joanna ;

Marchenkov, Atexei N. ;

Conrad, Edward H. ;

First, Phillip N. ;

de Heer, Wait A. .

SCIENCE, 2006, 312 (5777) :1191-1196

[8] Making graphene visible [J].

Blake, P. ;

Hill, E. W. ;

Castro Neto, A. H. ;

Novoselov, K. S. ;

Jiang, D. ;

Yang, R. ;

Booth, T. J. ;

Geim, A. K. .

APPLIED PHYSICS LETTERS, 2007, 91 (06)

[9] Ultrahigh electron mobility in suspended graphene [J].

Bolotin, K. I. ;

Sikes, K. J. ;

Jiang, Z. ;

Klima, M. ;

Fudenberg, G. ;

Hone, J. ;

Kim, P. ;

Stormer, H. L. .

SOLID STATE COMMUNICATIONS, 2008, 146 (9-10) :351-355

[10] Observation of the fractional quantum Hall effect in graphene [J].

Bolotin, Kirill I. ;

Ghahari, Fereshte ;

Shulman, Michael D. ;

Stormer, Horst L. ;

Kim, Philip .

NATURE, 2009, 462 (7270) :196-199

← 1 2 3 4 5 6 7 8 9 10 →