Fabrication and performance of graphene nanoelectromechanical systems

被引:50
作者
Barton, Robert A. [1 ]
Parpia, Jeevak [2 ]
Craighead, Harold G. [1 ]
机构
[1] Cornell Univ, Dept Appl & Engn Phys, Ithaca, NY 14853 USA
[2] Cornell Univ, Dept Phys, Ithaca, NY 14853 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2011年 / 29卷 / 05期
基金
美国国家科学基金会;
关键词
CHEMICAL-VAPOR-DEPOSITION; SUSPENDED GRAPHENE; EPITAXIAL GRAPHENE; LARGE-AREA; MONOLAYER GRAPHENE; MECHANICAL RESONATORS; MESOSCOPIC GRAPHITE; ELASTIC PROPERTIES; CARBON NANOTUBES; GROUND-STATE;
D O I
10.1116/1.3623419
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
As a result of the recent progress in fabricating large-area graphene sheets, graphene-based mechanical devices have become vastly easier to manufacture and now show even greater promise for a range of applications. This article reviews the progress of resonant graphene nanoelectromechanical systems and the possible applications of this technology to signal processing, sensing, and other areas. After discussing recent advances in fabrication and measurement techniques that make graphene resonators a viable technology, the article presents what is known about the performance of graphene mechanical systems. The authors also highlight unresolved questions, such as the source of the dissipation in graphene resonators, and discuss the progress made on these issues to date. The authors conclude with a discussion of important future directions for graphene research and the applications for which graphene nanomechanical devices may be well suited. (C) 2011 American Vacuum Society. [DOI: 10.1116/1.3623419]
引用
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页数:10
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