Deposition of copper phthalocyanine films by glow discharge-induced sublimation for gas sensing applications

被引:10
作者
Maggioni, G
Quaranta, A
Carturan, S
Patelli, A
Tonezzer, M
Ceccato, R
Della Mea, G
机构
[1] Univ Padua, Ist Nazl Fis Nucl, LNL, I-35020 Padua, Italy
[2] Univ Trent, Dept Mat Engn & Ind Technol, I-38050 Trento, Italy
[3] Univ Padua, Dept Elect & Informat, I-35131 Padua, Italy
关键词
organic coating; plasma; gas sensing; THIN-FILMS; COATINGS;
D O I
10.1016/j.surfcoat.2005.02.052
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this work, the deposition of copper phthalocyanine (CuPc) thin films by glow discharge-induced sublimation (GDS) is investigated. The physical properties of the deposited films are studied by FT-IR spectroscopy and nitrogen physisorption measurements. The gas/film interaction of the deposited coatings is tested by measuring their IR response and electrical conductivity in NO2- and NO-containing atmospheres. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:476 / 480
页数:5
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