Structure and dynamics of a magnetic neutral loop discharge plasma described using electron motion in a quadrupole magnetic field

被引:6
作者
Osaga, Tsuyoshi [1 ]
Sugawara, Hirotake [1 ]
Sakurai, Yohei [1 ]
机构
[1] Hokkaido Univ, Grad Sch Informat Sci & Technol, Div Elect Informat, Sapporo, Hokkaido 0600814, Japan
基金
日本学术振兴会;
关键词
SIMULATION;
D O I
10.1088/0963-0252/20/6/065003
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Electron motion in a CF(4) magnetic neutral loop discharge (NLD) plasma was simulated using a Monte Carlo method. The spatial distribution of electrons illustrated the fundamental structure of the NLD plasma, and its dynamics were depicted from the distributions of the mean electron energy, the electron energy gain and the azimuthal electron flux. The peak of mean electron energy appeared at the neutral loop (NL), which confirmed that electrons gain energy near this loop. High mean electron energy was observed not only near the NL but also along the separatrices of the quadrupole magnetic field. Energetic electrons were transported along the separatrices and induced ionization at those locations. However, the electron distribution had valleys along the separatrices, because electrons accelerated near the NL were likely to leave this region where the binding of the magnetic field is weak. The azimuthal electron flux representing the loop plasma current showed that the electron conduction path around the NL, which has conventionally been modelled as a ring conductor, has a particular directionality due to the rectification effect of antiparallel magnetic fields composing the quadrupole magnetic field. The directionality in the upper and lower regions of the quadrupole magnetic field was opposite to that in the inner and outer regions.
引用
收藏
页数:7
相关论文
共 17 条
  • [1] Very uniform and high aspect ratio anisotropy SiO2 etching process in magnetic neutral loop discharge plasma
    Chen, W
    Morikawa, Y
    Itoh, M
    Hayashi, T
    Sugita, K
    Shindo, H
    Uchida, T
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (05): : 2546 - 2550
  • [2] Transport coefficients and scattering cross-sections for plasma modelling in CF4-Ar mixtures:: a swarm analysis
    Kurihara, M
    Petrovic, ZL
    Makabe, T
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2000, 33 (17) : 2146 - 2153
  • [3] Plasma dynamics in an inductively coupled magnetic neutral loop discharge
    O'Connell, D.
    Gans, T.
    Crintea, D. L.
    Czarnetzki, U.
    Sadeghi, N.
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 2008, 17 (02)
  • [4] Experimental and numerical analyses of electron temperature and density distributions in a magnetic neutral loop discharge plasma
    Okraku-Yirenkyi, Y
    Sung, YM
    Otsubo, M
    Honda, C
    Sakoda, T
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2001, 19 (05): : 2590 - 2595
  • [5] Osaga T, 2011, IEEE T PLAS IN PRESS, P39
  • [6] Sakurai Y, 2011, IEEE T PLAS IN PRESS, P39
  • [7] Sugawara H., 2010, P 63 ANN GAS EL C 7
  • [8] Timesaving techniques for decision of electron-molecule collisions in Monte Carlo simulation of electrical discharges
    Sugawara, Hirotake
    Mori, Naoki
    Sakai, Yosuke
    Suda, Yoshiyuki
    [J]. JOURNAL OF COMPUTATIONAL PHYSICS, 2007, 223 (01) : 298 - 304
  • [9] Rectification effect of gradient antiparallel magnetic fields on electron conduction in a gas under a radio-frequency electric field
    Sugawara, Hirotake
    Osaga, Tsuyoshi
    Yamamoto, Hiromori
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 2011, 20 (05)
  • [10] Numerical Simulation of Electron Transport in Electric and Magnetic Fields for Analysis of Electron Temperature and Number Density Profiles Measured in Argon Magnetic Neutral Loop Discharge Plasma
    Sugawara, Hirotake
    Osaga, Tsuyoshi
    Tsuboi, Hideo
    Kuwahara, Kiyoshi
    Ogata, Seiji
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (08)