One-step Maskless Fabrication and Optical Characterization of Silicon Surfaces with Antireflective Properties and a White Color Appearance

被引：8

作者：

Schneider, Ling ^{[1
]}

Feidenhans'l, Nikolaj A. ^{[2
]}

Telecka, Agnieszka ^{[1
]}

Taboryski, Rafael J. ^{[1
]}

机构：

[1] Tech Univ Denmark, Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

[2] Danish Fundamental Metrol AS, Matemat 307, DK-2800 Lyngby, Denmark

来源：

SCIENTIFIC REPORTS | 2016年 / 6卷

关键词：

SOLAR-CELLS; NANOSTRUCTURES; PERFORMANCE; ABSORPTION; TEXTURES; ACHIEVE; LAYER; SI;

D O I：

10.1038/srep35183

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

We report a simple one-step maskless fabrication of inverted pyramids on silicon wafers by reactive ion etching. The fabricated surface structures exhibit excellent anti-reflective properties: The total reflectance of the nano inverted pyramids fabricated by our method can be as low as 12% without any anti-reflective layers, and down to only 0.33% with a silicon nitride coating. The results from angle resolved scattering measurements indicate that the existence of triple reflections is responsible for the reduced reflectance. The surfaces with the nano inverted pyramids also exhibit a distinct milky white color.

引用

页数：6

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