Effect of the oxygen flow on the properties of ITO thin films deposited by ion beam assisted deposition (IBAD)

被引：35

作者：

Meng, Li-Jian ^{[1
,2
]}

Gao, Jinsong ^{[3
]}

Silva, R. A. ^{[1
]}

Song, Shigeng ^{[4
]}

机构：

[1] Inst Super Engn Porto, Dept Fis, P-4200072 Oporto, Portugal

[2] Univ Minho, Ctr Fis, P-4700 Braga, Portugal

[3] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Ctr Opt Technol, Changchun 130033, Peoples R China

[4] Univ Paisley, Thin Film Ctr, Paisley PA1 2BE, Renfrew, Scotland

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 16期

关键词：

ITO; thin Film; ion beam assisted deposition; IR reflectance; optical and electrical properties;

D O I：

10.1016/j.tsf.2007.07.071

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

ITO films were deposited onto glass substrates by ion beam assisted deposition method. The oxygen ions were produced using a Kaufman ion source. The oxygen flow was varied from 20 until 60 sccm and the effect of the oxygen flow on properties of ITO films has been studied. The structural properties of the film were characterized by X-ray diffraction and atomic force microscopy. The optical properties were characterized by optical transmission measurements and the optical constants (refractive index n and extinction coefficient k) and film thickness have been obtained by fitting the transmittance using a semi-quantum model. The electrical properties were characterized by Hall effect measurements. It has been found that the ITO film with low electrical resistivity and high transmittance can be obtained with 40 sccm oxygen flow (the working pressure is about 2.3 x 10(-2) Pa at this oxygen flow). (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：5454 / 5459

页数：6

共 23 条

[1]

[Anonymous], 1978, ELEMENTS XRAY DIFFRA

[2]

*ASTM JOINT COMM P, 1967, 60416 ASTM JOINT COM

[3] Effects of tin on IR reflectivity, thermal emissivity, Hall mobility and plasma wavelength of sol-gel indium tin oxide films on glass [J].

Biswas, PK ;

De, A ;

Pramanik, NC ;

Chakraborty, PK ;

Ortner, K ;

Hock, V ;

Korder, S .

MATERIALS LETTERS, 2003, 57 (15) :2326-2332

[4] TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].

CHOPRA, KL ;

MAJOR, S ;

PANDYA, DK .

THIN SOLID FILMS, 1983, 102 (01) :1-46

[5] Spectroscopic ellipsometry studies of index profile of indium tin oxide films prepared by spray pyrolysis [J].

El Rhaleb, H ;

Benamar, E ;

Rami, M ;

Roger, JP ;

Hakam, A ;

Ennaoui, A .

APPLIED SURFACE SCIENCE, 2002, 201 (1-4) :138-145

[6] TRANSPARENT HEAT-REFLECTING COATINGS BASED ON HIGHLY DOPED SEMICONDUCTORS [J].

FRANK, G ;

KAUER, E ;

KOSTLIN, H .

THIN SOLID FILMS, 1981, 77 (1-3) :107-117

[7] Correlation between oxidation potential and open-circuit voltage of composite solar cells based on blends of polythiophenes/fullerene derivative [J].

Gadisa, A ;

Svensson, M ;

Andersson, MR ;

Inganäs, O .

APPLIED PHYSICS LETTERS, 2004, 84 (09) :1609-1611

[8] Electrochromic multilayer films of tunable color by combination of copper or iron complex and monolacunary Dawson-type polyoxometalate [J].

Gao, GG ;

Xu, L ;

Wang, WJ ;

An, WJ ;

Qiu, YF ;

Wang, ZQ ;

Wang, EB .

JOURNAL OF PHYSICAL CHEMISTRY B, 2005, 109 (18) :8948-8953

[9] TEMPERATURE-DEPENDENCE OF TRANSVERSE AND LONGITUDINAL OPTIC MODES IN ALPHA-PHASES AND BETA-PHASES OF QUARTZ [J].

GERVAIS, F ;

PIRIOU, B .

PHYSICAL REVIEW B, 1975, 11 (10) :3944-3950

[10] Transparent indium tin oxide films prepared by ion-assisted deposition with a single-layer overcoat [J].

Gilo, M ;

Dahan, R ;

Croitoru, N .

OPTICAL ENGINEERING, 1999, 38 (06) :953-957

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