Efficient anchor loss suppression in coupled near-field optomechanical resonators

Elastic dissipation through radiation towards the substrate is a major loss channel in micro-and nanomechanical resonators. Engineering the coupling of these resonators with optical cavities further complicates and constrains the design of low-loss optomechanical devices. In this work we rely on the coherent cancellation of mechanical radiation to demonstrate material and surface absorption limited silicon near-field optomechanical resonators oscillating at tens of MHz. The effectiveness of our dissipation suppression scheme is investigated at room and cryogenic temperatures. While at room temperature we can reach a maximum quality factor of 7.61k (fQ-product of the order of 10(11) Hz), at 22 K the quality factor increases to 37k, resulting in a fQ-product of 2 x 10(12) Hz. (C) 2017 Optical Society of America under the terms of the OSA Open Access Publishing Agreement