Detailed peak fitting analysis of the Zn 2p photoemission spectrum for metallic films and its initial oxidation stages

被引:48
作者
Cabrera-German, D. [1 ]
Molar-Velazquez, G. [1 ]
Gomez-Sosa, G. [1 ]
de la Cruz, W. [2 ]
Herrera-Gomez, A. [1 ]
机构
[1] CINVESTAV Unidad Queretaro, Queretaro 76230, Mexico
[2] Univ Nacl Autonoma Mexico, Ctr Nanociencias & Nanotecnol, Km 107 Carretera Tijuana Ensenada, Ensenada, Baja California, Mexico
关键词
active background approach; double-Lorentzian line-shape; quantitative XPS; Shirley background; SVSC background; zinc and zinc oxide; ELECTRON-ENERGY-LOSS; X-RAY-PHOTOEMISSION; CORE-LINE ASYMMETRIES; PHOTOIONIZATION CROSS-SECTIONS; QUANTITATIVE-ANALYSIS; SOFTWARE PACKAGE; XPS; SCATTERING; SURFACE; MODEL;
D O I
10.1002/sia.6280
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The metallic Zn 2p photoemission spectra hold a complex background that requires individual assignment of Shirley background for each peak comprising the spectra. For this reason, a close fit requires the use of the Shirley-Vegh-Salvi-Castle background-type under the active background approach. We found that the intensity of the plasmon peaks and their associated background cannot be described through existing energy loss (intrinsic and extrinsic) formalisms. We also analyzed the Zn 2p and O 1s spectra for the initial stages of oxide formation at various oxygen exposures. We found that the composition of the oxide layer is ZnO1.00 +/- 0.10 for all exposures, suggesting that our assessment of the primary function of metallic Zn is accurate and can be employed for quantitative studies. We also present a set of parameters to accurately fit and resolve the metallic and oxide Zn 2p peaks.
引用
收藏
页码:1078 / 1087
页数:10
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