Integration of CaCu3Ti4O12 capacitors into LTCC multilayer modules

被引：25

作者：

Loehnert, Romy ^{[1
]}

Capraro, Beate ^{[2
]}

Barth, Stefan ^{[2
]}

Bartsch, Heike ^{[3
]}

Mueller, Jens ^{[3
]}

Toepfer, Joerg ^{[1
]}

机构：

[1] Univ Appl Sci Jena, Dept SciTec, D-07745 Jena, Germany

[2] Fraunhofer Inst Ceram Technol & Syst, D-07629 Hermsdorf, Germany

[3] Ilmenau Univ Technol, Dept Elect Engn & Informat Technol, D-98693 Ilmenau, Germany

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 2015年 / 35卷 / 11期

关键词：

CCTO; LTCC; Embedded capacitor; PERMITTIVITY DIELECTRIC COMPOSITIONS; LOW-TEMPERATURE; MIDDLE-PERMITTIVITY; THICK-FILMS; CONSTANT; MICROSTRUCTURE; CERAMICS; BATIO3;

D O I：

10.1016/j.jeurceramsoc.2015.04.001

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The sintering behavior and electric properties of multilayer laminates made from tapes of CaCu3Ti4O12 (CCTO) with glass additive were studied. Sintering at 900 degrees C gives a fine-grained microstructure with a permittivity of epsilon' = 900. The co-firing behavior of hetero-laminates of CCTO and commercial CT700 glass ceramic LTCC tapes as well as with polycrystalline zinc titanate (ZT) LTCC tapes was studied. Co-firing of both heterolaminates is possible, however, cracking due to shrinkage and thermal expansion mismatch was observed in the CCTO/CT700 combination. Co-fired CCTO/ZT multilayer laminates did not show any cracks, delaminations or other defects. CCTO multilayer capacitor elements were integrated into LTCC zinc titanate multilayer laminates and co-fired at 900 degrees C with AgPd electrodes. (C) 2015 Elsevier Ltd. All rights reserved.

引用

页码：3043 / 3049

页数：7

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