共 13 条
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High-density inductively coupled plasma etching of GaAs/AlGaAs in BCl3/Cl2/Ar:: A study using a mixture design experiment
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1998, 16 (02)
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Low temperature plasma etching for Si3N4 waveguide applications
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2008, 26 (02)
:253-258