A highly sensitive SnO2-CuO multilayered sensor structure for detection of H2S gas

被引：99

作者：

Verma, Manish Kumar ^{[1
]}

Gupta, Vinay ^{[1
]}

机构：

[1] Univ Delhi, Dept Phys & Astrophys, Elect Mat & Devices Lab, Delhi 110007, India

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2012年 / 166卷

关键词：

SnO2-CuO multilayer; H2S sensor; Thin film; Pulsed laser deposition; SENSING PROPERTIES; ENHANCED RESPONSE; THIN-FILMS; COPPER; MECHANISM; SURFACE;

D O I：

10.1016/j.snb.2012.02.076

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Sensing response characteristics of bare SnO2 thin film and SnO2-CuO multilayered structures having different CuO content (3 vol%, 6 vol% and 12 vol%) towards 20 ppm H2S gas has been studied. SnO2-CuO multilayered structure having an optimum amount of 3 vol% CuO is found to exhibit a high response of 2.7 x 10(4) at a relatively low operating temperature of 140 degrees C, with a fast response time (t(90)) of 2s. The enhanced sensing response and the fast response speed are due to the porous microstructure of the deposited thin films in the multilayered sensor structures and the spill-over of the dissociated H2S gas molecules by the CuO layers on the surface of sensing SnO2 layers. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：378 / 385

页数：8

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