UNCOOLED LONG-WAVELENGTH INFRARED SENSOR USING CYTOCHROME C PROTEIN ON CMOS READ-OUT CIRCUITS

被引:0
作者
Yen, PoHsien [1 ]
Liang, SuoFeng [1 ]
Su, GuoDung John [1 ]
机构
[1] Natl Taiwan Univ, Taipei, Taiwan
来源
2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2017年
关键词
Long wavelength infrared (LWIR); microbolometer; infrared sensor; cytochrome c protein; temperature coefficient of resistance (TCR); CMOS circuit; inkjet printer;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Cytochrome c protein thin film shows high temperature coefficient of resistance (TCR). In this paper, we studied the characteristics of cytochrome c protein, whose absorption rate is 65% at wavelengths of 10 mu m. We designed a chip for an infrared microbolometer with suspended aluminum electrodes. The protein solution was deposited on a sensing pixel using an inkjet printer. The TCR, thermal conductance, time constant, responsivity and detectivity were 25.98(%/K), 7.96 x 10(-5) (W/K), 1.094 (ms), 2.57 x 10(4) (V/W) and 5.89 x 10(8) (cm. Hz(1/2)/W), respectively. We experimentally demonstrated integrating cytochrome c protein with a CMOS circuit as a sensing pixel for a long-wavelength infrared microbolometer at room temperature. Based on our experimental results, such a microbolometer array holds promise for the future.
引用
收藏
页码:611 / 614
页数:4
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