Near-edge x-ray absorption of carbon materials for determining bond hybridization In mixed sp2/sp3 bonded materials

Near-edge x-ray absorption fine structure (NEXAFS) measurements were performed on a variety of carbon materials, covering a range of hybrid bonding character from pure sp3 type to pure sp2 type. Diamond, chemical vapor deposited (CVD) diamond films of varying quality. Diamond-like carbon (DLC) films. and graphite were examined with this technique and these measurements were compared with Raman spectroscopy results and scanning electron microscopy images of carbon film morphology. For the mixed sp2 and sp3 bonded DLC materials, NEXAFS does not suffer from tile large Raman cross-section difference between sp2 and sp3 type bonds, thus allowing unambiguous characterization of carbon thin films with a broader range of sp2/sp3 bonding ratios than possible with Raman spectroscopy alone. This capability was used to determine the transition point where the sequential-CVD carbon film growth technique produces predominately sp3 or sp2 bonded material. (C) 1996 American Institute of Physics.