Microreplicated RF toroidal inductor

被引：22

作者：

Ermolov, V ^{[1
]}

Lindström, T

Nieminen, H

Olsson, M

Read, M

Ryhänen, T

Silanto, S

Uhrberg, S

机构：

[1] Nokia Res Ctr, FIN-00045 Helsinki, Finland

[2] Amic AB, SE-75183 Uppsala, Sweden

来源：

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 2004年 / 52卷 / 01期

关键词：

inductors; micromachining; plastics; RF microelectromechanical system (MEMS); transformer;

D O I：

10.1109/TMTT.2003.821236

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on the modeling and fabrication of a truly three-dimensional high-quality-factor toroidal inductor using polymer replication processes. The critical dimensions are in the micrometer range, and the applied manufacturing method is based on polymer replication. Electrical measurements show that the inductor with an inductance of 6.0 nH exhibits a peak quality factor of 50 at a, frequency of 3 GHz. Model verified by the measurement results shows that further improvement is still possible. Furthermore, the applied manufacturing technique can be extended to become a flexible packaging platform.

引用

页码：29 / 37

页数：9

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