Endurance of chalcogenide optical phase change materials: a review

被引:49
作者
MARTIN-MONIER, L. O. U. I. S. [1 ]
POPESCU, C. O. S. M. I. N. C. O. N. S. T. A. N. T. I. N. [1 ]
RANNO, L. U. I. G. I. [1 ]
MILLS, B. R. I. A. N. [1 ]
GEIGER, S. A. R. A. H. [2 ]
CALLAHAN, D. E. N. N. I. S. [2 ]
MOEBIUS, M. I. C. H. A. E. L. [2 ]
HU, J. U. E. J. U. N. [1 ]
机构
[1] MIT, Dept Mat Sci & Engn, 77 Massachusetts Ave, Cambridge, MA 02139 USA
[2] Charles Stark Draper Lab Inc, Cambridge, MA 02139 USA
基金
瑞士国家科学基金会;
关键词
CHANGE METASURFACE; SB2S3; OXIDATION; GE2SB2TE5; FILMS; VOID FORMATION; CRYSTALLIZATION; NONVOLATILE; PERFORMANCE; MECHANISM; KINETICS; TEM;
D O I
10.1364/OME.456428
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Chalcogenide phase change materials (PCMs) are truly remarkable compounds whose unique switchable optical and electronic properties have fueled an explosion of emerging applications in electronics and photonics. Key to any application is the ability of PCMs to reliably switch between crystalline and amorphous states over a large number of cycles. While this issue has been extensively studied in the case of electronic memories, current PCM-based photonic devices show limited endurance. This review discusses the various parameters that impact crystallization and re-amorphization of several PCMs, their failure mechanisms, and formulate design rules for enhancing cycling durability of these compounds.
引用
收藏
页码:2145 / 2167
页数:23
相关论文
共 150 条
[1]  
Abdollahramezani S., 2021, ARXIV PREPRINT ARXIV
[2]   Tunable nanophotonics enabled by chalcogenide phase-change materials [J].
Abdollahramezani, Sajjad ;
Hemmatyar, Omid ;
Taghinejad, Hossein ;
Krasnok, Alex ;
Kiarashinejad, Yashar ;
Zandehshahvar, Mohammadreza ;
Alu, Andrea ;
Adibi, Ali .
NANOPHOTONICS, 2020, 9 (05) :1189-1241
[3]   Effects of surface oxidation on the crystallization characteristics of Ge-rich Ge-Sb-Te alloys thin films [J].
Agati, Marta ;
Gay, Clement ;
Benoit, Daniel ;
Claverie, Alain .
APPLIED SURFACE SCIENCE, 2020, 518
[4]   Suppressed electronic contribution in thermal conductivity of Ge2Sb2Se4Te [J].
Aryana, Kiumars ;
Zhang, Yifei ;
Tomko, John A. ;
Bin Hoque, Md Shafkat ;
Hoglund, Eric R. ;
Olson, David H. ;
Nag, Joyeeta ;
Read, John C. ;
Rios, Carlos ;
Hu, Juejun ;
Hopkins, Patrick E. .
NATURE COMMUNICATIONS, 2021, 12 (01)
[5]  
Bez R, 2013, 2013 5TH IEEE INTERNATIONAL MEMORY WORKSHOP (IMW), P13, DOI 10.1109/IMW.2013.6582084
[6]   Modification of Ge-rich GeSbTe surface during the patterning process of phase-change memories [J].
Canvel, Yann ;
Lagrasta, Sebastien ;
Boixaderas, Christelle ;
Barnola, Sebastien ;
Mazel, Yann ;
Dabertrand, Karen ;
Martinez, Eugenie .
MICROELECTRONIC ENGINEERING, 2020, 221
[7]   Study of Ge-rich GeSbTe etching process with different halogen plasmas [J].
Canvel, Yann ;
Lagrasta, Sebastien ;
Boixaderas, Christelle ;
Barnola, Sebastien ;
Mazel, Yann ;
Martinez, Eugenie .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2019, 37 (03)
[8]   Fundamentals and Applications of Chalcogenide Phase-Change Material Photonics [J].
Cao, Tun ;
Cen, Mengjia .
ADVANCED THEORY AND SIMULATIONS, 2019, 2 (08)
[9]   Tuneable Thermal Emission Using Chalcogenide Metasurface [J].
Cao, Tun ;
Zhang, Xinyu ;
Dong, Weiling ;
Lu, Li ;
Zhou, Xilin ;
Zhuang, Xin ;
Deng, Junhong ;
Cheng, Xing ;
Li, Guixin ;
Simpson, Robert E. .
ADVANCED OPTICAL MATERIALS, 2018, 6 (16)
[10]  
Chen C. F., 2009, 2009 IEEE, Int Mem Work IMW 09