Texture formation in MBE-grown NiTiCu thin films

被引:0
作者
Hassdorf, R [1 ]
Feydt, J [1 ]
Thienhaus, S [1 ]
Boese, M [1 ]
Moske, M [1 ]
机构
[1] Ctr Adv European Studies & Res CAESAR, D-53175 Bonn, Germany
来源
SMST-2003: Proceedings of the International Conference on Shape Memory and Superelastic Technologies | 2004年
关键词
shape memory alloy; martensitic transformation; thin film; molecular beam epitaxy; phase formation; combinatorial synthesis;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We present a study demonstrating the capability for controlled shape memory thin-film growth using molecular beam epitaxy for the NiTiCu alloy system. The martensitic transition in these films occurs at film thicknesses well below 1 pin with comparable transition temperatures as known for thick sputter-deposited films (1-10 mu m). Mechanical stress measurements reveal a stress recovery on the order of 300 MPa. Single- or two-stage transformation is observed depending on the quantity of the Cu additions which is discussed in the context of a load-temperature phase transition diagram. As for the microstructure, the crystallites are highly oriented along the film plane normal. Moreover, splitting of the martensite orientation is detected, indicating the selection of two sets of martensite variants with defined orientation characteristics. The occurrence of this preferential order is deduced to the formation of a Ti-rich (Ti2Ni) phase at the film-substrate interface providing a highly oriented initial crystallization template. In this respect, the relevance of Ti2Ni precipitates is addressed. The results described in this study outline the perspectives for tailoring the microstructure and transformation performance of shape memory thin films, especially in regard to technological applications.
引用
收藏
页码:713 / 722
页数:10
相关论文
共 22 条
[1]  
CHANDUSZKO A, SMST 2000, P375
[2]   Crystallization temperature and activation energy of rf-sputtered near-equiatomic TiNi and Ti50Ni40Cu10 thin films [J].
Chen, JZ ;
Wu, SK .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2001, 288 (1-3) :159-165
[3]  
Farnell G.W., 1972, PHYS ACOUSTICS, V9, P35, DOI 10.1016/B978-0-12-395670-5.50007-6
[4]   Transformation and deformation behavior in sputter-deposited Ti-Ni-Cu thin films [J].
Hashinaga, T ;
Miyazaki, S ;
Ueki, T ;
Horikawa, H .
JOURNAL DE PHYSIQUE IV, 1995, 5 (C8) :689-694
[5]   Phase formation and structural sequence of highly-oriented MBE-grown NiTiCu shape memory thin films [J].
Hassdorf, R ;
Feydt, J ;
Pascal, R ;
Thienhaus, S ;
Boese, M ;
Sterzl, T ;
Winzek, B ;
Moske, M .
MATERIALS TRANSACTIONS, 2002, 43 (05) :933-938
[6]  
HUA SZ, 1993, MATER RES SOC S P, P33
[7]   Shape memory microvalves based on thin films or rolled sheets [J].
Kohl, M ;
Dittmann, D ;
Quandt, E ;
Winzek, B ;
Miyazaki, S ;
Allen, DM .
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1999, 273 :784-788
[8]   IMPROVED METHOD OF NONINTRUSIVE DEPOSITION RATE MONITORING BY ATOMIC-ABSORPTION SPECTROSCOPY FOR PHYSICAL VAPOR-DEPOSITION PROCESSES [J].
LU, C ;
GUAN, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03) :1797-1801
[9]   Martensitic transformations in sputter-deposited Ti-Ni-Cu shape memory alloy thin films [J].
Miyazaki, S ;
Hashinaga, T ;
Ishida, A .
THIN SOLID FILMS, 1996, 281 :364-367
[10]  
Miyazaki S., 1998, Shape Memory Materials, V12, P267