Structural, mechanical, tribological, and corrosion properties of a-SiC:H coatings prepared by PECVD

被引:41
作者
Guruvenket, S. [1 ]
Azzi, M. [1 ]
Li, D. [2 ]
Szpunar, J. A. [2 ]
Martinu, L. [1 ]
Klemberg-Sapieha, J. E. [1 ]
机构
[1] Ecole Polytech, Dept Engn Phys, Montreal, PQ H3C 3A7, Canada
[2] Dept Mining Met & Mat Engn, Montreal, PQ H3A 2B2, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
a-SiC:H coatings; Structural properties; Elasto-plastic properties; Wear; Corrosion; Tribo-corrosion; H THIN-FILMS; RAMAN-SPECTRA; HARD; CARBON; OPTIMIZATION; PERSPECTIVE;
D O I
10.1016/j.surfcoat.2010.03.031
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Amorphous hydrogenated silicon-carbide (a-SiC:H) coatings appear very attractive due to their superior optical and mechanical properties and chemical inertness. In the present work a-SiC:H coatings were prepared by PECVD on stainless steel 301 (SS301) and Ti-6Al-4V (TiAlV) substrates at a temperature of 300 degrees C, using different SiH4/CH4 precursor ratios. We systematically studied such mechanical properties as hardness, reduced Young's modulus and elastic recovery using depth-sensing indentation, their tribological characteristics such as coefficient of friction and wear coefficient using the pin-on-disc method, as well as their corrosion and tribo-corrosion behaviors. a-SiC:H films (similar to 3 mu m thick) prepared on SS301 and TiAlV at optimal deposition conditions exhibited a hardness of 23.5 GPa. reduced Young's modulus of 160 GPa, and elastic rebound of 73%. They showed a friction coefficient of similar to 0.35, and a wear rate of 10 x 10(-6) mm(3)/Nm. These values are low compared to similar to 0.85 and similar to 0.5, 240 x 10(-6) mm(3)/Nm and 700 x 10(-6) mm(3)/Nm for SS301 and TiAlV, respectively. The films exhibited a very high corrosion and tribo-corrosion resistance on both metallic substrates. The coating behavior is correlated with the microstructure and composition, determined by complementary characterization techniques including ERD, FTIR and Raman analyses. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:3358 / 3365
页数:8
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