A simple and powerful analytical model for MEMS piezoelectric multimorphs

被引：5

作者：

Booij, W. E. ^{[1
]}

Vogl, A. H. ^{[1
]}

Wang, D. T. ^{[1
]}

Tyholdt, F. ^{[1
]}

Ostbo, N. P. ^{[1
]}

Raeder, H. ^{[1
]}

Prume, K. ^{[2
]}

机构：

[1] SINTEF, N-0314 Oslo, Norway

[2] AixACCT Syst GmbH, D-52068 Aachen, Germany

来源：

JOURNAL OF ELECTROCERAMICS | 2007年 / 19卷 / 04期

关键词：

multimorph cantilever; piezoelectric; analytical model; MEMS; energy harvesting;

D O I：

10.1007/s10832-007-9034-5

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We have developed an analytical model for use in design and modelling of piezoelectric MEMS devices. The model allows for incorporation of any number of device material layers in a multimorph structure including piezoelectric materials. The resulting lumped circuit model fully incorporates the electro-mechanical coupling effects in the piezoelectric layers as well as electrical or mechanical loading of the device structure. Since the model is analytic, and only requires the specification of well-defined material properties, it allows for fast and interactive modelling of a multitude of MEMS device structures incorporating piezoelectric materials. We will demonstrate the capability of the model by presenting results from fitting the model to impedance measurements performed on cantilever structures. This allows for extraction of device and material parameters that are difficult to obtain by other means, such as the piezoelectric coefficient and the mechanical quality factor.

引用

页码：387 / 393

页数：7

共 14 条

[1] Method for obtaining the full set of linear electric, mechanical, and electromechanical coefficients and all related losses of a piezoelectric ceramic [J].