We have carried out a detailed study of the dependence of ICRF mode conversion flow drive (MCFD) on plasma and RF parameters. The flow drive efficiency is found to depend strongly on the He-3 concentration in D(He-3) plasmas, a key parameter separating the ICRF minority heating regime and mode conversion regime. At +90 degrees antenna phasing (waves in the co-I-p direction) and dipole phasing, the driven flow is in the co-I-p direction, and the change of the rotation velocity increases with both P-RF and I-p, and scales unfavorably vs. plasma density and antenna frequency. When MCFD is applied to I-mode plasmas, the plasma rotation increases until the onset of MHD modes triggered by large sawtooth crashes. Very high performance I-mode plasmas with H-ITER98, (y2) similar to 1.4 and T(e)0 similar to 8 keV have been obtained in these experiments.