Demonstration of Multiple Internal Resonances in a Microelectromechanical Self-Sustained Oscillator

被引：20

作者：

Houri, S. ^{[1
]}

Hatanaka, D. ^{[1
]}

Asano, M. ^{[1
]}

Yamaguchi, H. ^{[1
]}

机构：

[1] NTT Corp, NTT Basic Res Labs, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 2430198, Japan

来源：

PHYSICAL REVIEW APPLIED | 2020年 / 13卷 / 01期

关键词：

Even- and odd-mode - Frequency ratios - Gain feedbacks - Internal resonance - Micro-electro-mechanical - Self-oscillations - Self-sustained oscillators - Torsional modes;

D O I：

10.1103/PhysRevApplied.13.014049

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We investigate the dynamics of a microelectromechanical self-sustained oscillator supporting multiple resonating and interacting modes. In particular, the interaction of the first four flexural modes along with the first torsional mode are studied, whereby 1:2, 1:3, and 2:1 internal resonances occur. Even and odd modes are induced to couple by breaking the longitudinal symmetry of the structure. Self-oscillations are induced in the second flexural mode via a gain-feedback loop; thereafter its frequency is pulled into a commensurate frequency ratio with the other modes, enabling the oscillator to act as a driver or pump for four modes simultaneously.

引用

页数：8

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