3D Simulation of the Coil Geometry Effect on the Induction Heating Process in Czochralski Crystal Growth System

被引：9

作者：

Heidari, Hamed ^{[1
]}

Tavakoli, Mohammad Hossein ^{[2
]}

Shokri, AbdolJabbar ^{[3
]}

Mohamad Moradi, Behnam ^{[4
]}

Mohammad Sharifi, Omid ^{[1
]}

Asaad, M. Jamil M. ^{[5
]}

机构：

[1] TVU, Fac Shahid Yazdanpanh, Sanandaj Branch, Dept Math & Phys, Kurdistan, Iran

[2] Bu Ali Sina Univ, Dept Phys, Hamadan 65174, Hamadan, Iran

[3] Univ Payamenoor, Dept Sci, POB 19359-3697, Tehran, Iran

[4] Tech & Vocat Training Org, Kurdistan, Iran

[5] Univ Garmian, Dept Phys, Coll Educ, Kalar, Iraq

来源：

CRYSTAL RESEARCH AND TECHNOLOGY | 2020年 / 55卷 / 03期

关键词：

3D simulation; crystal growth; induction heating; RF-coils; FLUID-FLOW; TRANSPORT;

D O I：

10.1002/crat.201900147

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Herein, influence of coil geometry in a Czochralski crystal growth system is studied using 3D finite element method. Three different geometries for the helical RF-coil including solenoid, conical solenoid, and rectangular are considered and distribution of magnetic flux density (through the system), produced heat in the RF-coil and the graphite crucible, as well as heat volume integral are calculated. The obtained numerical results show that every considered coil produces a special heating structure due to its shape with some advantages and disadvantages.

引用

页数：6

共 13 条

[1] AN INTEGRATED PROCESS MODEL FOR THE GROWTH OF OXIDE CRYSTALS BY THE CZOCHRALSKI METHOD [J].

DERBY, JJ ;

ATHERTON, LJ ;

GRESHO, PM .

JOURNAL OF CRYSTAL GROWTH, 1989, 97 (3-4) :792-826

[2] Influence of magnetic flux concentrator on the induction heating process in crystal growth systems-geometry investigation [J].

Heidari, Hamed ;

Tavakoli, Mohammad Hossein ;

Sobhani, Sayed Omid ;

Honarmandnia, Mohtaram .

CRYSTENGCOMM, 2018, 20 (48) :7857-7865

[3] Global simulation of an RF Czochralski furnace during different stages of germanium single crystal growth [J].

Honarmandnia, M. ;

Tavakoli, M. H. ;

Sadeghi, H. .

CRYSTENGCOMM, 2016, 18 (21) :3942-3948

[4] Effect of RF coil position on spoke pattern on oxide melt surface in Czochralski crystal growth [J].

Jing, CJ ;

Kobayashi, M ;

Tsukada, T ;

Hozawa, M ;

Fukuda, T ;

Imaishi, N ;

Shimamura, K ;

Ichinose, N .

JOURNAL OF CRYSTAL GROWTH, 2003, 252 (04) :550-559

[5] Influence of crucible and coil geometry on the induction heating process in Czochralski crystal growth system [J].

Khodamoradi, Hossein ;

Tavakoli, Mohammad Hossein ;

Mohammadi, Kheirollah .

JOURNAL OF CRYSTAL GROWTH, 2015, 421 :66-74

[6]

Rudnev V., 2017, Handbook of Induction Heating

[7]

Semiatin SL., 1988, Elements of Induction Heating: Design, Control, and Applications

[8] Numerical study of heat transport and fluid flow during different stages of sapphire Czochralski crystal growth [J].

Tavakoli, M. H. .

JOURNAL OF CRYSTAL GROWTH, 2008, 310 (12) :3107-3112

[9] Two and three-dimensional numerical modeling of induction heating in oxide Czochralski systems [J].

Tavakoli, M. H. ;

Wilke, H. .

CRYSTAL RESEARCH AND TECHNOLOGY, 2008, 43 (05) :483-489

[10] Influence of the crucible bottom shape on the heat transport and fluid flow during the seeding process of oxide Czochralski crystal growth [J].

Tavakoli, M. H. ;

Wilke, H. ;

Crnogorac, N. .

CRYSTAL RESEARCH AND TECHNOLOGY, 2007, 42 (12) :1252-1258

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