Near-field scanning optical microscopy studies of thin film surfaces and interfaces

被引：2

作者：

Klapetek, Petr ^{[1
]}

Bursik, Jiri ^{[2
]}

机构：

[1] Czech Metrol Inst, Brno 63800, Czech Republic

[2] Inst Phys Mat, Brno 61662, Czech Republic

来源：

APPLIED SURFACE SCIENCE | 2008年 / 254卷 / 12期

关键词：

NSOM; FDTD; image artifacts;

D O I：

10.1016/j.apsusc.2007.10.092

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this article, the results of the modeling of topography related artifacts appearing in near-field scanning optical microscopy measurements are presented. The results obtained for near-field scanning optical microscope operation in reflection mode with off-axis far field detector position are compared with experimental results. It is shown that the chosen numerical method-Finite Difference in Time Domain method (FDTD) - can be used for efficient modeling of main topography related artifact. It is also seen that the far field detector position can have large influence on the resulting reflection mode optical images. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：3681 / 3684

页数：4