A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits

被引：71

作者：

Chen, Wen-Chien ^{[1
]}

Fang, Weileun ^{[1
,2
]}

Li, Sheng-Shian ^{[1
,2
]}

机构：

[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu, Taiwan

[2] Natl Tsing Hua Univ, NanoEngn & MicroSyst Inst, Hsinchu, Taiwan

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2011年 / 21卷 / 06期

关键词：

D O I：

10.1088/0960-1317/21/6/065012

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A generalized foundry-oriented CMOS-MEMS platform well suited for integrated micromechanical resonators alongside IC amplifiers has been developed for commercial multi-user purpose and demonstrated with a fast turnaround time of only 3 months and a variety of design flexibilities for resonator applications. With this platform, different configurations of capacitively-transduced resonators monolithically integrated with their amplifier circuits, spanning frequencies from 500 kHz to 14.5 MHz, have been realized with resonator Q's ranging between 700 and 3500. This platform, specifically featured with various configurations of structural materials, multi-dimensional displacements, different arrangements of mechanical boundary conditions, tiny supports of resonators, large transduction areas, well-defined anchors and performance enhancement scaling with IC fabrication technology, offers a variety of flexible design options targeted for sensor, timing reference, and RF applications. In addition, resonators consisting of metal-oxide composite structures fabricated by this platform offer an effective temperature compensation scheme for the first time in CMOS-MEMS resonators, showing TCf six times better than that of resonators merely made by CMOS metals.

引用

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