Simultaneous estimation of thickness and refractive index by combining transmission and reflection measurements

被引:0
作者
Busboom, Imke [1 ]
Christmann, Simon [1 ]
Haehnel, Hartmut [1 ]
Feige, Volker K. S. [1 ]
Tibken, Bernd [2 ]
机构
[1] Dusseldorf Univ Appl Sci, D-40476 Dusseldorf, Germany
[2] Univ Wuppertal, D-42119 Wuppertal, Germany
来源
TERAHERTZ, RF, MILLIMETER, AND SUBMILLIMETER-WAVE TECHNOLOGY AND APPLICATIONS XIV | 2021年 / 11685卷
关键词
thickness measurements; material parameter; refractive index; terahertz time-domain spectroscopy; transmission; reflection;
D O I
10.1117/12.2577601
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Investigating layer thicknesses with terahertz time-domain spectroscopy usually requires the refractive index of the layer of interest. The refractive index is either investigated beforehand by independent measurements or it is measured simultaneously. The challenge of a simultaneous determination is that measuring two unknown values requires the use of two linearly independent equations. To address this challenge, our approach is to combine transmission and reflection time-of-flight measurements. By combining these measurements, we obtain a system of two linearly independent equations for the two unknown values: thickness and average refractive index. We experimentally validate our simultaneous estimation approach by measuring calibration foils of different thicknesses.
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页数:8
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共 10 条
  • [1] Frequency-wavelet domain deconvolution for terahertz reflection imaging and spectroscopy
    Chen, Yang
    Huang, Shengyang
    Pickwell-MacPherson, Emma
    [J]. OPTICS EXPRESS, 2010, 18 (02): : 1177 - 1190
  • [2] Terahertz Superresolution Stratigraphic Characterization of Multilayered Structures Using Sparse Deconvolution
    Dong, Junliang
    Wu, Xiaolong
    Locquet, Alexandre
    Citrin, David S.
    [J]. IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY, 2017, 7 (03) : 260 - 267
  • [3] Material parameter estimation with terahertz time-domain spectroscopy
    Dorney, TD
    Baraniuk, RG
    Mittleman, DM
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2001, 18 (07) : 1562 - 1571
  • [4] Highly precise determination of optical constants and sample thickness in terahertz time-domain spectroscopy
    Duvillaret, L
    Garet, F
    Coutaz, JL
    [J]. APPLIED OPTICS, 1999, 38 (02) : 409 - 415
  • [5] Fedulova E. V., SPIE P, V83370I
  • [6] Contact-Free Multilayer Thickness Determination of Industrial Coatings Using THz Measuring Techniques
    Feige, Volker K. S.
    Berta, Milan
    Nix, Stephan
    Ellrich, Frank
    Jonuscheit, Joachim
    Beigang, Rene
    [J]. TM-TECHNISCHES MESSEN, 2012, 79 (02) : 87 - 94
  • [7] Measurement of thickness and refractive index using femtosecond and terahertz pulses
    Hussain, Babar
    Nawaz, Muhammad
    Ahmed, Mushtaq
    Raja, M. Yasin Akhtar
    [J]. LASER PHYSICS LETTERS, 2013, 10 (05)
  • [8] Krimi S, 2016, INT CONF INFRA MILLI
  • [9] Properties of building and plastic materials in the THz range
    Piesiewicz, R.
    Jansen, C.
    Wietzke, S.
    Mittleman, D.
    Koch, M.
    Kuerner, T.
    [J]. INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES, 2007, 28 (05): : 363 - 371
  • [10] Highly accurate optical material parameter determination with THz time-domain spectroscopy
    Pupeza, Ioachim
    Wilk, Rafal
    Koch, Martin
    [J]. OPTICS EXPRESS, 2007, 15 (07): : 4335 - 4350