Atomic-level insights through spectroscopic and transport measurements into the large-area synthesis of MoS2 thin films

被引:7
作者
Samassekou, Hassana [1 ]
Alkabsh, Asma [1 ]
Stiwinter, Kenneth [1 ]
Khatri, Avinash [1 ]
Mazumdar, Dipanjan [1 ]
机构
[1] Southern Illinois Univ, Dept Phys, Carbondale, IL 62901 USA
基金
美国国家科学基金会;
关键词
MOLYBDENUM-DISULFIDE; GROWTH; DEPOSITION; MONOLAYER; THICKNESS; LAYERS;
D O I
10.1557/mrc.2018.167
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Several structure-property relationships are reported in large-area MoS2 thin films to understand the effect of sulfur vacancies along with complementary first-principles calculations. X-ray diffraction and reflectivity measurements demonstrated that sputtered MoS2 followed by a high-temperature sulfurization produced sharp film-substrate interface along with high crystalline order. Spectroscopic and transport measurements showed that removal of sulfur vacancies promoted A-B excitons, strong in-plane Raman modes, a sharp increase in dc resistivity, and strong photo-conducting behavior. We have clearly demonstrated that a hybrid method using magnetron sputtering can provide high-quality few-layer transition metal dichalcogenide films.
引用
收藏
页码:1328 / 1334
页数:7
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