A 100GHz Bandpass Filter Employing Shielded Folded Ridged Quarter-Mode SIW Resonator in CMOS Technology

A miniaturized shielded folded ridged quarter-mode Substrate Integrated Waveguide (FRQMSIW) resonator in 1P6M CMOS technology is presented for millimetre wave applications. By adding a capacitive ridge and folded it inside the resonator, a significant miniaturization is realized. An additional shielded structure is employed to mitigate the leakage from the effective perfect conductor of the conventional quarter-mode SIW cavity. The characteristics of the proposed resonator are investigated first and then employed to design a 100GHz bandpass filter (BPF) with two transmission zeros. Finally, the proposed filter is implemented in 1P6M CMOS technology and measured. The active size of the proposed BPF without pads is 309 mu m x 275 mu m (similar to 0.1 x similar to 0.09 lambda), and the measured insertion loss (vertical bar S-21 vertical bar) is 2.06dB.