Broadband transitions for micro-machined waveguides

被引:0
作者
Wollack, Edward J. [1 ]
Vanin, Felice Maria [2 ]
机构
[1] NASA, Goddard Space Flight Ctr, Greenbelt, MD 20771 USA
[2] Univ Maryland, Dept Elect Engn, College Pk, MD 20740 USA
来源
2007 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-6 | 2007年
关键词
waveguides; waveguide transitions; waveguide discontinuities;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
When chemically micromachining silicon wafers by wet etching, the naturally occurring shapes are trapezoidal or hexagonal instead of rectangular. Practical applications require interfacing these common crossections with standard rectangular waveguides; therefore, efficient transitions with broadband characteristics are necessary for enhancing reliability, simplicity, and cost-effectiveness. This paper presents a straightforward design approach and measurements for convenient broadband transitions. The uses of such interfaces improve compatibility with existing precision waveguide measurement capabilities and facilitate the realization of broadband transitions.
引用
收藏
页码:1742 / +
页数:2
相关论文
共 13 条
[1]  
Becker J. P., 1999, IEEE 8th Topical Meeting on Electrical Performance of Electronic Packaging (Cat. No.99TH8412), P221, DOI 10.1109/EPEP.1999.819230
[2]   A finite ground coplanar line-to-silicon micromachined waveguide transition [J].
Becker, JP ;
Lee, Y ;
East, JR ;
Katehi, LPB .
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2001, 49 (10) :1671-1676
[3]   Analysis of an octagonal micromachined horn antenna for submillimeter-wave applications [J].
Hesler, JL ;
Hui, K ;
Dahlstrom, RK ;
Weikle, RM ;
Crowe, TW ;
Mann, CM ;
Wallace, HB .
IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 2001, 49 (06) :997-1001
[4]  
JOHANSSON JF, 1992, IEEE T MICROW THEORY, V40, P795, DOI 10.1109/22.137380
[5]   Characterization of micromachined silicon rectangular waveguide at 400 GHz [J].
Kirby, P. L. ;
Pukala, D. ;
Manohara, H. ;
Mehdi, I. ;
Papapolymerou, J. .
IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2006, 16 (06) :366-368
[6]   THE RELATIONSHIP BETWEEN DUAL-MODE CAVITY CROSS-COUPLING AND WAVE-GUIDE POLARIZERS [J].
LEVY, R .
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1995, 43 (11) :2614-2620
[8]   Micromachining for terahertz applications [J].
Lubecke, VM ;
Mizuno, K ;
Rebeiz, GM .
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1998, 46 (11) :1821-1831
[9]   Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies [J].
McGrath, William R. ;
Walker, Christopher ;
Yap, Markus ;
Tai, Yu-Chong .
IEEE Microwave and Guided Wave Letters, 1993, 3 (03) :61-63
[10]  
MONTGOMERY CG, 1987, IEE ELECTROMAGNETIC, V25, P42