Densely integrated multiple-wavelength vertical-cavity surface-emitting laser array

被引：16

作者：

Onomura, A ^{[1
]}

Arai, M ^{[1
]}

Kondo, T ^{[1
]}

Matsutani, A ^{[1
]}

Miyamoto, T ^{[1
]}

Koyama, F ^{[1
]}

机构：

[1] Tokyo Inst Technol, Microsyst Res Ctr, P&I Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 2003年 / 42卷 / 5B期

关键词：

vertical cavity surface emitting laser; multiple-wavelength; densely integrated; single mode operation; non-planar MOCVD; array; photolithography;

D O I：

10.1143/JJAP.42.L529

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We demonstrated a densely integrated multiple-wavelength GaInAs/GaAs vertical-cavity surface-emitting laser (VCSEL) array using non planar metal-organic chemical vapor deposition (MOCVD). The fabricated 1-mm-long array consists of 20-channel VCSELs and the pitch between each channel is as small as 50mum. The lasing wavelength of each channel was precisely designed based on the relationship between the lasing wavelength and the pattern width. The wavelength spacing is within 1 nm. All VCSELs exhibited single-mode operation, an output power of over 1.2 mW and a threshold current of 0.52 +/- 0.1 mA.

引用

页码：L529 / L531

页数：3

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