All-Silicon Terahertz Metasurface With Sharp Fano Resonance and Its Sensing Applications

被引：20
作者：
Zhong, Yajun [1 ,2 ]
Du, Lianghui [1 ,3 ]
Liu, Qiao [1 ,3 ]
Zhu, Liguo [1 ,3 ]
Zou, Yi [1 ]
Zhang, Bin [2 ]
机构：
[1] China Acad Engn Phys, Inst Fluid Phys, Mianyang 621900, Sichuan, Peoples R China
[2] Sichuan Univ, Coll Elect & Informat Engn, Chengdu 610065, Sichuan, Peoples R China
[3] China Acad Engn Phys, Microsyst & Terahertz Res Ctr, Mianyang 621900, Sichuan, Peoples R China
来源：
IEEE PHOTONICS JOURNAL | 2021年 / 13卷 / 02期
基金：
中国国家自然科学基金;
关键词：
Metasurfaces; Graphene; Sensors; Q-factor; Electric fields; Refractive index; Silicon; All-silicon metasurface; sharp resonance; refractive index sensing; graphene sensing; INDUCED TRANSPARENCY; METAMATERIALS; ARRAY;
D O I：
10.1109/JPHOT.2021.3065096
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The all silicon terahertz metasurface with sharp Fano resonance and its sensing applications with high Q factor have been investigated. Such metasurface, composed of periodic grooves, can be fabricated by deep silicon etching on high-resistivity silicon. When the refractive index of the sample changes, the shifted resonance frequency appears and the resonance intensity can be modulated by altering the surface conductivity. The Q characteristics of the metasurface and the applications of graphene sensing are then analyzed and verified. The results indicates that the Q factor of the metasurface can reach 39857, the standard sensitivity is 16042 nm/RIU, and the FOM is 533. Meanwhile, the characteristics of sensing graphene samples (similar to 1 nm) are very useful for sensing other ultra-thin materials or biomolecules.
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页数：11
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