Electrochemically deposited thermoelectric n-type Bi2Te3 thin films

被引:192
作者
Yoo, BY
Huang, CK
Lim, JR
Herman, J
Ryan, MA
Fleurial, JP
Myung, NV [1 ]
机构
[1] Univ Calif Riverside, Dept Environm Chem & Engn, Riverside, CA 92521 USA
[2] CALTECH, Jet Prop Lab, Mat & Device Technol Grp, Pasadena, CA 91109 USA
关键词
bismuth; tellurium; electrodeposition; thermoelectric; microstructure;
D O I
10.1016/j.electacta.2005.02.016
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Electrochemically deposited n-type BiTe alloy thin films were grown from nitric acid baths on sputtered BixTey/SiO/Si substrates. The film compositions, which varied from 57 to 63 at.% Te were strongly dependent on the deposition conditions. Surface morphologies varied from needle-like to granular structures depending on deposited Te content. Electrical and thermoelectric properties of these electrodeposited BixTey thin films were measured before and after annealing and compared to those of bulk Bi2Te3. Annealing at 250 degrees C in reducing H-2 atmosphere enhanced thermoelectric properties by reducing film defects. In-plane electrical resistivity was highly dependent on composition and microstructure. In-plane Hall mobility decreased with increasing carrier concentration, while the magnitude of the Seebeck coefficient increased with increasing electrical conductivity to a maximum of -188.5 mu V/K. Overall, the thermoelectric properties of electrodeposited n-type BiTe thin films after annealing were comparable to those of bulk BiTe films. (c) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码:4371 / 4377
页数:7
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