Fabrication of large-size photonic crystals by holographic lithography using a lens array

被引：7
作者：
Liang, Bing [1 ,2 ]
Liu, Yikun [1 ]
Li, Juntao [1 ]
Song, Liyan [1 ]
Li, Yongyao [1 ]
Zhou, Jianying [1 ]
Wong, Kam Sing [3 ]
机构：
[1] Sun Yat Sen Univ, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Guangdong, Peoples R China
[2] Guangdong Petrol Chem Technol Inst, Dept Chem Engn, Foshan, Peoples R China
[3] Hong Kong Univ Sci & Technol, Dept Phys, Kowloon, Hong Kong, Peoples R China
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2012年 / 22卷 / 03期
关键词：
Fabrication; -; Holography;
D O I：
10.1088/0960-1317/22/3/035013
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Holographic fabrication of large-size photonic crystals with a lens array is proposed and demonstrated. A substantial increase of the usable size for two-dimensional and three-dimensional photonic crystals is obtained compared with the template prepared with a mask and a single-lens system.
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页数：5
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