Design and simulation of diffractive optical components in fast optical imaging systems

被引:2
作者
Herkommer, Alois M. [1 ]
Reichle, Rene [1 ]
Haefner, Matthias [1 ]
Pruss, Christof [1 ]
机构
[1] Univ Stuttgart, Inst Tech Opt, D-70569 Stuttgart, Germany
来源
OPTICAL DESIGN AND ENGINEERING IV | 2011年 / 8167卷
关键词
Optical Design; Diffractive Optics; Simulation; FABRICATION; ELEMENTS;
D O I
10.1117/12.896837
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Recent lithographic technologies allow for the fabrication of high period diffractive structures on planar and curved optical surfaces with high precision. Such diffractive surfaces offer the optical designer extra degrees of freedom, which are of special importance for optical systems, where light collection efficiency is important. We illustrate the usage and benefit of diffractive elements within fast optical systems in various applications. For these hybrid design classes it is mandatory to include the realistic as-built performance of the employed diffractive elements into the design phase. Correspondingly we present simulation techniques to include fabrication specific diffraction efficiencies and stray light into the optimization and evaluation process.
引用
收藏
页数:9
相关论文
共 23 条
[1]   Aberration-free imaging with an aplanatic curved diffractive element [J].
Bokor, N ;
Davidson, N .
APPLIED OPTICS, 2001, 40 (32) :5825-5829
[2]   Diffractive-refractive hybrid microscope objective for 193 nm inspection systems [J].
Brunner, R ;
Steiner, R ;
Rudolf, K ;
Dobschal, HJ .
GRADIENT INDEX, MINIATURE, AND DIFFRACTIVE OPTICAL SYSTEMS III, 2003, 5177 :9-15
[3]   DESIGN OF DIFFRACTIVE SINGLETS FOR MONOCHROMATIC IMAGING [J].
BURALLI, DA ;
MORRIS, GM .
APPLIED OPTICS, 1991, 30 (16) :2151-2158
[4]   Maskless, parallel patterning with zone-plate array lithography [J].
Carter, DJD ;
Gil, D ;
Menon, R ;
Mondol, MK ;
Smith, HI ;
Anderson, EH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (06) :3449-3452
[5]   Nanometer-accurate grating fabrication with scanning beam interference lithography [J].
Chen, CG ;
Konkola, PT ;
Heilmann, RK ;
Joo, C ;
Schattenburg, ML .
NANO- AND MICROTECHNOLOGY: MATERIALS, PROCESSES, PACKAGING, AND SYSTEMS, 2002, 4936 :126-134
[6]   ANALYTIC DESIGN OF HYBRID DIFFRACTIVE REFRACTIVE ACHROMATS [J].
DAVIDSON, N ;
FRIESEM, AA ;
HASMAN, E .
APPLIED OPTICS, 1993, 32 (25) :4770-4774
[7]  
Epple A., 2006, P IODC C
[8]  
Hafner M., 2011, APPL OPTICS, V52, P23
[9]  
Hafner M., 2009, 3 EOS TOP M OPT MICR
[10]   ABERRATIONS OF CURVED ZONE PLATES AND FRESNEL LENSES [J].
KLEINHANS, WA .
APPLIED OPTICS, 1977, 16 (06) :1701-1704