共 23 条
[2]
Diffractive-refractive hybrid microscope objective for 193 nm inspection systems
[J].
GRADIENT INDEX, MINIATURE, AND DIFFRACTIVE OPTICAL SYSTEMS III,
2003, 5177
:9-15
[3]
DESIGN OF DIFFRACTIVE SINGLETS FOR MONOCHROMATIC IMAGING
[J].
APPLIED OPTICS,
1991, 30 (16)
:2151-2158
[4]
Maskless, parallel patterning with zone-plate array lithography
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1999, 17 (06)
:3449-3452
[5]
Nanometer-accurate grating fabrication with scanning beam interference lithography
[J].
NANO- AND MICROTECHNOLOGY: MATERIALS, PROCESSES, PACKAGING, AND SYSTEMS,
2002, 4936
:126-134
[6]
ANALYTIC DESIGN OF HYBRID DIFFRACTIVE REFRACTIVE ACHROMATS
[J].
APPLIED OPTICS,
1993, 32 (25)
:4770-4774
[7]
Epple A., 2006, P IODC C
[8]
Hafner M., 2011, APPL OPTICS, V52, P23
[9]
Hafner M., 2009, 3 EOS TOP M OPT MICR
[10]
ABERRATIONS OF CURVED ZONE PLATES AND FRESNEL LENSES
[J].
APPLIED OPTICS,
1977, 16 (06)
:1701-1704