Implantable microsystems currently under development have the potential to significantly impact the future treatment of disease. Functions of such implants will include localized sensing of temperature and pressure, electrical stimulation of neural tissue and the delivery of drugs. The devices are designed to be long-term implants that are remotely powered and controlled for many applications. The development of new, biocompatible materials and manufacturing processes that ensure long-lasting functionality and reliability are critical challenges. Important factors in the assembly of such systems are the small size of the features, the heat sensitivity of integrated electronics and media, the precision alignment required to hold small tolerances, and the type of materials and material combinations to be hermetically scaled. Laser micromachining has emerged as a compelling solution to address these manufacturing challenges. This paper will describe the latest achievements in microjoining of metallic and non-metallic materials. The focus is on glass, metal and polymers that have been joined using CO2, Nd:YAG and diode lasers. Results in joining similar and dissimilar materials in different joint configurations are presented, as well as requirements for sample preparation and fixturing. The potential for applications in the biomedical sector will be demonstrated.
