Femtosecond laser 3D nanoprinting for functional devices

被引:0
作者
Sun, Hong-Bo [1 ]
Han, Bing [1 ]
机构
[1] Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
来源
SPIE MICRO + NANO MATERIALS, DEVICES, AND APPLICATIONS 2019 | 2019年 / 11201卷
关键词
femtosecond laser; 3D printing; functional devices; optics; soft robot;
D O I
10.1117/12.2541304
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Laser nanofabrication is a powerful technique, which could realize 3D programming of materials for the designable fabrication and flexible integration of 3D intelligent devices. No matter hard or soft materials can be manufactured or modified through femtosecond laser. 3D fuchtional devices, including micro-electronics, machines, optics or fluidics are successfully made by this powerful technology. Smart functional devices that could be controllably manipulated to complete predictable actuation have been readily fabricated through laser processing. Recent results on femtosecond laser 3D nanoprinting for functional devices are demonstrated. We believe that in the near future, the femtosecond laser smart processing technology would be widely employed to make smart materials with 3D features, contributing to the development of 3D functional materials, devices, system and robotics.
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页数:2
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