Surface acoustic wave-based gas sensors

被引：132
作者：
Jakubik, Wieslaw P. [1 ]
机构：
[1] Silesian Tech Univ, Inst Phys, PL-44100 Gliwice, Poland
来源：
THIN SOLID FILMS | 2011年 / 520卷 / 03期
关键词：
Surface acoustic wave; Rayleigh wave; Gas sensor; Layered films; HYDROGEN DETECTION; CONDUCTIVITY CHANGES; CHEMICAL SENSORS; SAW-CHEMOSENSOR; SYSTEM; PHTHALOCYANINE; PALLADIUM; FILMS; DEVICES; SINGLE;
D O I：
10.1016/j.tsf.2011.04.174
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A brief review of the Surface Acoustic Wave (SAW)-based gas sensors and their physical operation background in a dual-delay line oscillator system is presented together with some own achievements dealing with SAW layered sensor structures. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码：986 / 993
页数：8
相关论文
共 58 条
[1]   ELASTIC PROPERTIES OF THIN-FILM PALLADIUM FOR SURFACE-ACOUSTIC-WAVE (SAW) SENSORS [J].
ANISIMKIN, VI ;
KOTELYANSKII, IM ;
VERARDI, P ;
VERONA, E .
SENSORS AND ACTUATORS B-CHEMICAL, 1995, 23 (2-3) :203-208
[2]  
Auld B.A., 1973, ACOUSTIC FIELDS WAVE, V2, P271
[3]  
Baer R.L., 1992, P IEEE ULTR S, V18, P293
[4]   UV crosslinked polysiloxanes as new coating materials for SAW devices with high long-term stability [J].
Barie, N ;
Rapp, M ;
Ache, HJ .
SENSORS AND ACTUATORS B-CHEMICAL, 1998, 46 (02) :97-103
[5]   A HIGHLY SENSITIVE NO2 SENSOR BASED ON ELECTRICAL-CONDUCTIVITY CHANGES IN PHTHALOCYANINE FILMS [J].
BOTT, B ;
JONES, TA .
SENSORS AND ACTUATORS, 1984, 5 (01) :43-53
[6]   Acoustic wave gas sensors [J].
Cheeke, JDN ;
Wang, Z .
SENSORS AND ACTUATORS B-CHEMICAL, 1999, 59 (2-3) :146-153
[7]  
Chevalier E., 2010, SENS ACTUATORS
[8]  
D'Amic A, 1982, IEEE ULTRASONICS S, V1, P308
[9]   SAW SENSORS [J].
DAMICO, A ;
VERONA, E .
SENSORS AND ACTUATORS, 1989, 17 (1-2) :55-66
[10]   Acoustic wave chemical sensors for gases [J].
Dorozhkin, LM ;
Rozanov, IA .
JOURNAL OF ANALYTICAL CHEMISTRY, 2001, 56 (05) :399-416
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