Surface acoustic wave-based gas sensors

被引：125
作者：
Jakubik, Wieslaw P. [1 ]
机构：
[1] Silesian Tech Univ, Inst Phys, PL-44100 Gliwice, Poland
来源：
THIN SOLID FILMS | 2011年 / 520卷 / 03期
关键词：
Surface acoustic wave; Rayleigh wave; Gas sensor; Layered films; HYDROGEN DETECTION; CONDUCTIVITY CHANGES; CHEMICAL SENSORS; SAW-CHEMOSENSOR; SYSTEM; PHTHALOCYANINE; PALLADIUM; FILMS; DEVICES; SINGLE;
D O I：
10.1016/j.tsf.2011.04.174
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A brief review of the Surface Acoustic Wave (SAW)-based gas sensors and their physical operation background in a dual-delay line oscillator system is presented together with some own achievements dealing with SAW layered sensor structures. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码：986 / 993
页数：8
相关论文
共 58 条
  • [1] ELASTIC PROPERTIES OF THIN-FILM PALLADIUM FOR SURFACE-ACOUSTIC-WAVE (SAW) SENSORS
    ANISIMKIN, VI
    KOTELYANSKII, IM
    VERARDI, P
    VERONA, E
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1995, 23 (2-3) : 203 - 208
  • [2] Auld B.A., 1973, ACOUSTIC FIELDS WAVE, V2, P271
  • [3] Baer R.L., 1992, P IEEE ULTR S, V18, P293
  • [4] UV crosslinked polysiloxanes as new coating materials for SAW devices with high long-term stability
    Barie, N
    Rapp, M
    Ache, HJ
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1998, 46 (02) : 97 - 103
  • [5] A HIGHLY SENSITIVE NO2 SENSOR BASED ON ELECTRICAL-CONDUCTIVITY CHANGES IN PHTHALOCYANINE FILMS
    BOTT, B
    JONES, TA
    [J]. SENSORS AND ACTUATORS, 1984, 5 (01): : 43 - 53
  • [6] Acoustic wave gas sensors
    Cheeke, JDN
    Wang, Z
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1999, 59 (2-3) : 146 - 153
  • [7] Chevalier E., 2010, SENS ACTUATORS
  • [8] D'Amic A, 1982, IEEE ULTRASONICS S, V1, P308
  • [9] SAW SENSORS
    DAMICO, A
    VERONA, E
    [J]. SENSORS AND ACTUATORS, 1989, 17 (1-2): : 55 - 66
  • [10] Acoustic wave chemical sensors for gases
    Dorozhkin, LM
    Rozanov, IA
    [J]. JOURNAL OF ANALYTICAL CHEMISTRY, 2001, 56 (05) : 399 - 416
123456