Cupric and cuprous oxide by reactive ion beam sputter deposition and the photosensing properties of cupric oxide metal-semiconductor-metal Schottky photodiodes

被引：20

作者：

Hong, Min-Jyun ^{[1
]}

Lin, Yong-Chen ^{[1
]}

Chao, Liang-Chiun ^{[1
]}

Lin, Pao-Hung ^{[1
]}

Huang, Bohr-Ran ^{[1
]}

机构：

[1] Natl Taiwan Univ Sci & Technol, Dept Elect & Comp Engn, Taipei 106, Taiwan

来源：

APPLIED SURFACE SCIENCE | 2015年 / 346卷

关键词：

CuO; Cu2O; Photosensing; Reactive ion beam sputtering; CU2O THIN-FILMS; SOLAR-CELLS; CUO;

D O I：

10.1016/j.apsusc.2015.03.185

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Cupric (CuO) and cuprous (Cu2O) oxide thin films have been deposited by reactive ion beam sputter deposition at 400 degrees C with an Ar:O-2 ratio from 2:1 to 12:1. With an Ar:O-2 ratio of 2:1, single phase polycrystalline CuO thin films were obtained. Decreasing oxygen flow rate results in CuO + Cu2O and Cu2O + Cu mixed thin films. As Ar: O-2 ratio reaches 12:1, Cu2O nanorods with diameter of 250 nm and length longer than 1 pm were found across the sample. Single phase CuO thin film exhibits an indirect band gap of 1.3 eV with a smooth surface morphology. CuO metal-semiconductor-metal (MSM) Schottky photodiodes (PD) were fabricated by depositing Cu interdigitated electrodes on CuO thin films. Photosensing properties of the CuO PD were characterized from 350 to 1300 nm and a maximum responsivity of 43 mA/W was found at lambda = 700 nm. The MSM PD is RC limited with a decay time constant less than 1 mu s. (C) 2015 Elsevier B.V. All rights reserved.

引用

页码：18 / 23

页数：6

共 20 条

[1] Fabrication and characterization of copper oxide-silicon nanowire heterojunction photodiodes [J].

Akgul, Guvenc ;

Akgul, Funda Aksoy ;

Mulazimoglu, Emre ;

Unalan, Husnu Emrah ;

Turan, Rasit .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2014, 47 (06)

[2] Thin film deposition of Cu2O and application for solar cells [J].

Akimoto, K. ;

Ishizuka, S. ;

Yanagita, M. ;

Nawa, Y. ;

Paul, Goutam K. ;

Sakurai, T. .

SOLAR ENERGY, 2006, 80 (06) :715-722

[3] Photovoltaic properties of thin film heterojunctions with cupric oxide absorber [J].

Dimopoulos, T. ;

Peic, A. ;

Muellner, P. ;

Neuschitzer, M. ;

Resel, R. ;

Abermann, S. ;

Postl, M. ;

List, E. J. W. ;

Yakunin, S. ;

Heiss, W. ;

Brueckl, H. .

JOURNAL OF RENEWABLE AND SUSTAINABLE ENERGY, 2013, 5 (01)

[4] PROPERTIES OF REACTIVELY-SPUTTERED COPPER-OXIDE THIN-FILMS [J].

DROBNY, VF ;

PULFREY, DL .

THIN SOLID FILMS, 1979, 61 (01) :89-98

[5] Photovoltaic properties of the p-CuO/n-Si heterojunction prepared through reactive magnetron sputtering [J].

Gao, Fei ;

Liu, Xiao-Jing ;

Zhang, Jun-Shan ;

Song, Mei-Zhou ;

Li, Ning .

JOURNAL OF APPLIED PHYSICS, 2012, 111 (08)

[6] Fast response ZnO:Al/CuO nanowire/ZnO:Al heterostructure light sensors fabricated by dielectrophoresis [J].

Garcia Marin, A. ;

Garcia Nunez, C. ;

Ruiz, E. ;

Piqueras, J. ;

Pau, J. L. .

APPLIED PHYSICS LETTERS, 2013, 102 (23)

[7] On the growth and electrical characterization of CuO nanowires by thermal oxidation [J].

Goncalves, A. M. B. ;

Campos, L. C. ;

Ferlauto, A. S. ;

Lacerda, R. G. .

JOURNAL OF APPLIED PHYSICS, 2009, 106 (03)

[8] The copper-cuprous-oxide rectifier and photoelectric cell [J].

Grondahl, LO .

REVIEWS OF MODERN PHYSICS, 1933, 5 (02) :0141-0168

[9] A simple method for the determination of doping type in nanomaterials based on electrical response to humidity [J].

Han, Jin-Woo ;

Kim, Beomseok ;

Kobayashi, Nobuhiko P. ;

Li, Jing ;

Meyyappan, M. .

APPLIED PHYSICS LETTERS, 2012, 101 (14)

[10] Hall mobility of cuprous oxide thin films deposited by reactive direct-current magnetron sputtering [J].

Lee, Yun Seog ;

Winkler, Mark T. ;

Siah, Sin Cheng ;

Brandt, Riley ;

Buonassisi, Tonio .

APPLIED PHYSICS LETTERS, 2011, 98 (19)

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