Radiation response of a MEMS accelerometer: An electrostatic force

被引：49

作者：

Edmonds, LD ^{[1
]}

Swift, GM ^{[1
]}

Lee, CI ^{[1
]}

机构：

[1] CALTECH, Jet Prop Lab, Pasadena, CA 91109 USA

来源：

IEEE TRANSACTIONS ON NUCLEAR SCIENCE | 1998年 / 45卷 / 06期

基金：

美国国家航空航天局;

关键词：

D O I：

10.1109/23.736528

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Particle irradiation on the mechanical sensor of the ADXL50 microelectromechanical accelerometer shifts the output voltage. An earlier conclusion, that a dielectric below the sensor becomes charged, is extended by quantifying the effect of this charge on device output. It is shown that an electrostatic force is consistent with the observation that the output voltage shift is independent of acceleration. Possible charging mechanisms are suggested. An appendix derives a convenient algorithm for calculating electrostatic forces, which may also be used for other MEMS devices.

引用

页码：2779 / 2788

页数：10

共 6 条

[1]

[Anonymous], AN DEV DAT SHEET ADF

[2]

DEVANEY JR, 1977, NBS SPECIAL PUBLICAT

[3]

GARRETT HB, 1980, SPACE SYSTEMS THEIR, P173

[4] The effects of radiation on MEMS accelerometers [J].