Real time observation of reconstruction transitions on GaAs (111)B surface by scanning electron microscopy

被引:7
作者
Ren, HW [1 ]
Tanaka, M [1 ]
Nishinaga, T [1 ]
机构
[1] UNIV TOKYO,GRAD SCH ENGN,BUNKYO KU,TOKYO 113,JAPAN
关键词
D O I
10.1063/1.117788
中图分类号
O59 [应用物理学];
学科分类号
摘要
Scanning electron microscopy (SEM) has been applied to directly observe the root 19 X root 19 and (1 X 1)(HT) reconstructions and their transitions on the GaAs (111)B vicinal surfaces under As pressure, root 19 X root 19 reconstruction and 1 X 1 high temperature reconstructions known os (1 X 1)(HT) reconstructions are observed in dark and bright contrast, respectively, During the transition, root 19 X root 19 domains start to develop from the macrostep edges on to the lower (1 X 1)(HT) reconstructed terraces, while (1 X 1)(HT) domains start to develop from the macrostep edges on to the upper root 19 X root 19 reconstructed terraces. The transition diagram in the surface coverage of domains shows hysteresis, Since Ga diffusion, As incorporation or reevaporation are enhanced during the transitions, heavy step bunching with rough macrostep edges is observed. (C) 1996 American Institute of Physics.
引用
收藏
页码:565 / 567
页数:3
相关论文
共 9 条
[1]   RECONSTRUCTIONS OF GAAS(1BAR1BAR1BAR) SURFACES OBSERVED BY SCANNING TUNNELING MICROSCOPY [J].
BIEGELSEN, DK ;
BRINGANS, RD ;
NORTHRUP, JE ;
SWARTZ, LE .
PHYSICAL REVIEW LETTERS, 1990, 65 (04) :452-455
[2]   MOLECULAR-BEAM EPITAXY (MBE) OF IN1-XGAXAS AND GASB1-YASY [J].
CHANG, CA ;
LUDEKE, R ;
CHANG, LL ;
ESAKI, L .
APPLIED PHYSICS LETTERS, 1977, 31 (11) :759-761
[3]   SURFACE STRUCTURES AND PHOTOLUMINESCENCE OF MOLECULAR BEAM EPITAXIAL FILMS OF GAAS [J].
CHO, AY ;
HAYASHI, I .
SOLID-STATE ELECTRONICS, 1971, 14 (02) :125-&
[4]   ATOMIC STEP IMAGING ON SILICON SURFACES BY SCANNING ELECTRON-MICROSCOPY [J].
HOMMA, Y ;
TOMITA, M ;
HAYASHI, T .
ULTRAMICROSCOPY, 1993, 52 (02) :187-192
[5]  
REN HW, IN PRESS J CRYST GRO
[6]   STEP MOTION ON CRYSTAL SURFACES .2. [J].
SCHWOEBEL, RL .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (02) :614-+
[7]   1ST REAL-TIME OBSERVATION OF RECONSTRUCTION TRANSITION ASSOCIATED WITH GA DROPLET FORMATION AND ANNIHILATION DURING MOLECULAR-BEAM EPITAXY OF GAAS [J].
SUZUKI, T ;
NISHINAGA, T .
JOURNAL OF CRYSTAL GROWTH, 1994, 142 (1-2) :49-60
[8]   THE MOLECULAR-BEAM EPITAXIAL-GROWTH OF GAAS/GAAS(111)B - DOPING AND GROWTH TEMPERATURE STUDIES [J].
WOOLF, DA ;
SOBIESIERSKI, Z ;
WESTWOOD, DI ;
WILLIAMS, RH .
JOURNAL OF APPLIED PHYSICS, 1992, 71 (10) :4908-4915
[9]   IN-SITU OBSERVATION OF PHASE-TRANSITION AND THE TRANSITION-INDUCED STEP BUNCHING ON INAS(001) SURFACES BY SCANNING ELECTRON-MICROSCOPY [J].
YAMAGUCHI, H ;
HOMMA, Y ;
HORIKOSHI, Y .
APPLIED PHYSICS LETTERS, 1995, 66 (13) :1626-1628